Determination of acid diffusion rate in a chemically amplified resist with scanning tunneling microscope lithography

F. Keith Perkins

doi:10.1116/1.586632

Determination of acid diffusion rate in a chemically amplified resist with scanning tunneling microscope lithography

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586632 ◽

1993 ◽

Vol 11 (6) ◽

pp. 2597 ◽

Cited By ~ 13

Author(s):

F. Keith Perkins

Keyword(s):

Scanning Tunneling Microscope ◽

Diffusion Rate ◽

Scanning Tunneling ◽

Tunneling Microscope ◽

Acid Diffusion ◽

Chemically Amplified ◽

Chemically Amplified Resist

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Determination of modulation wavelengths in nanoscale electrodeposited superlattices using the scanning tunneling microscope

Nanostructured Materials ◽

10.1016/0965-9773(93)90133-v ◽

1993 ◽

Vol 3 (1-6) ◽

pp. 511

Author(s):

R.P. Raffaelle ◽

T.D. Golden ◽

R.J. Phillips ◽

J.A. Switzer

Keyword(s):

Scanning Tunneling Microscope ◽

Scanning Tunneling ◽

Tunneling Microscope

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Determination of Electron Transport Parameters in Al0.3Ga0.7As by Scanning-Tunneling-Microscope Light-Emission Spectroscopy

10.1063/1.1639770 ◽

2003 ◽

Author(s):

Hidenori Hashimoto

Keyword(s):

Electron Transport ◽

Scanning Tunneling Microscope ◽

Emission Spectroscopy ◽

Light Emission ◽

Scanning Tunneling ◽

Transport Parameters ◽

Tunneling Microscope

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Determination of Photoswitching Dynamics through Chiral Mapping of Single Molecules Using a Scanning Tunneling Microscope

Physical Review Letters ◽

10.1103/physrevlett.104.178301 ◽

2010 ◽

Vol 104 (17) ◽

Cited By ~ 47

Author(s):

Matthew J. Comstock ◽

David A. Strubbe ◽

Luis Berbil-Bautista ◽

Niv Levy ◽

Jongweon Cho ◽

...

Keyword(s):

Scanning Tunneling Microscope ◽

Single Molecules ◽

Scanning Tunneling ◽

Tunneling Microscope

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Thickness determination of biological samples with a zeta-calibrated scanning tunneling microscope.

Proceedings of the National Academy of Sciences ◽

10.1073/pnas.87.23.9343 ◽

1990 ◽

Vol 87 (23) ◽

pp. 9343-9347 ◽

Cited By ~ 21

Author(s):

Z. H. Wang ◽

T. Hartmann ◽

W. Baumeister ◽

R. Guckenberger

Keyword(s):

Biological Samples ◽

Scanning Tunneling Microscope ◽

Scanning Tunneling ◽

Tunneling Microscope ◽

Thickness Determination

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Accurate determination of multiple sets of single molecular conductance of Au/1,6-hexanedithiol/Au break junctions by ultra-high vacuum-scanning tunneling microscope and analyses of individual current–separation curves

Nanotechnology ◽

10.1088/0957-4484/18/42/424005 ◽

2007 ◽

Vol 18 (42) ◽

pp. 424005 ◽

Cited By ~ 24

Author(s):

Ayano Nishikawa ◽

Junichi Tobita ◽

Yasuyuki Kato ◽

Shintaro Fujii ◽

Masaaki Suzuki ◽

...

Keyword(s):

Scanning Tunneling Microscope ◽

Accurate Determination ◽

High Vacuum ◽

Ultra High Vacuum ◽

Scanning Tunneling ◽

Break Junctions ◽

Tunneling Microscope ◽

Molecular Conductance

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Determination of spot size and acid diffusion length in positive chemically amplified resist for e-beam lithography at 100 and 5 kV

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.4900730 ◽

2014 ◽

Vol 32 (6) ◽

pp. 06FJ02 ◽

Cited By ~ 4

Author(s):

Florian Delachat ◽

Christophe Constancias ◽

Jérôme Reche ◽

Bernard Dal'Zotto ◽

Laurent Pain ◽

...

Keyword(s):

Diffusion Length ◽

Spot Size ◽

Acid Diffusion ◽

Chemically Amplified ◽

Chemically Amplified Resist

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Determination of the spatial extension of the surface-plasmon evanescent field of a silver film with a photon scanning tunneling microscope

Physical Review B ◽

10.1103/physrevb.48.2680 ◽

1993 ◽

Vol 48 (4) ◽

pp. 2680-2683 ◽

Cited By ~ 48

Author(s):

P. M. Adam ◽

L. Salomon ◽

F. de Fornel ◽

J. P. Goudonnet

Keyword(s):

Surface Plasmon ◽

Scanning Tunneling Microscope ◽

Silver Film ◽

Evanescent Field ◽

Scanning Tunneling ◽

Tunneling Microscope ◽

Spatial Extension ◽

Photon Scanning Tunneling Microscope

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Direct Determination of the Exciton Binding Energy of Conjugated Polymers Using a Scanning Tunneling Microscope

Physical Review Letters ◽

10.1103/physrevlett.81.1082 ◽

1998 ◽

Vol 81 (5) ◽

pp. 1082-1085 ◽

Cited By ~ 229

Author(s):

S. Alvarado ◽

P. Seidler ◽

D. Lidzey ◽

D. Bradley

Keyword(s):

Binding Energy ◽

Conjugated Polymers ◽

Scanning Tunneling Microscope ◽

Direct Determination ◽

Exciton Binding Energy ◽

Scanning Tunneling ◽

Tunneling Microscope

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Real Space Observation of Standing Waves at Metal Surfaces and the Determination of Surface State Dispersion with the Scanning Tunneling Microscope

Japanese Journal of Applied Physics ◽

10.1143/jjap.33.3675 ◽

1994 ◽

Vol 33 (Part 1, No. 6B) ◽

pp. 3675-3678 ◽

Cited By ~ 2

Author(s):

Yukio Hasegawa ◽

Phaedon Avouris

Keyword(s):

Surface State ◽

Scanning Tunneling Microscope ◽

Metal Surfaces ◽

Standing Waves ◽

Real Space ◽

Scanning Tunneling ◽

Tunneling Microscope

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Determination of mode-cutoff wavelengths and refractive-index profile of planar optical waveguides with a photon scanning tunneling microscope

Physical Review B ◽

10.1103/physrevb.51.11225 ◽

1995 ◽

Vol 51 (16) ◽

pp. 11225-11228 ◽

Cited By ~ 8

Author(s):

E. Bourillot ◽

S. I. Hosain ◽

J. P. Goudonnet ◽

G. Voirin ◽

G. Kotrotsios

Keyword(s):

Scanning Tunneling Microscope ◽

Optical Waveguides ◽

Refractive Index Profile ◽

Scanning Tunneling ◽

Index Profile ◽

Tunneling Microscope ◽

Mode Cutoff ◽

Photon Scanning Tunneling Microscope ◽

Planar Optical Waveguides

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