Broad area, intense electron beam source for high resolution, high throughput semiconductor lithography

1993 ◽  
Vol 11 (5) ◽  
pp. 1868 ◽  
Author(s):  
T-Y. Hsu
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
High Throughput ◽  
Broad Area ◽  
Beam Source ◽  
Intense Electron Beam ◽  
Intense Electron

Pulsed electron-beam source for high-resolution high-throughput microlithography

1994 ◽  
Author(s):  
Tseng-Yang Hsu ◽  
Peyman Hadizad ◽  
Rong L. Liou ◽  
Greg Roth ◽  
Martin A. Gundersen
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
High Throughput ◽  
Beam Source ◽  
Pulsed Electron Beam

An intense electron beam source

1983 ◽  
Vol 16 (4) ◽  
pp. 499-504 ◽  
Author(s):  
J Yeheskel ◽  
D Gazit ◽  
R Avida ◽  
M Friedman
Keyword(s):  
Electron Beam ◽  
Beam Source ◽  
Intense Electron Beam ◽  
Intense Electron

Note: Design and initial results of a multi-pulsed intense electron beam source

2014 ◽  
Vol 85 (6) ◽  
pp. 066108 ◽  
Author(s):  
L. Xia ◽  
H. Zhang ◽  
A. Yang ◽  
Y. Shen ◽  
W. Wang ◽  
...  
Keyword(s):  
Electron Beam ◽  
Beam Source ◽  
Intense Electron Beam ◽  
Intense Electron ◽  
Initial Results

A sub-nanosecond rise time intense electron beam source

2014 ◽  
Vol 9 (04) ◽  
pp. P04017-P04017 ◽  
Author(s):  
R Kumar ◽  
R Chandra ◽  
S Mitra ◽  
M D Beg ◽  
D K Sharma ◽  
...  
Keyword(s):  
Electron Beam ◽  
Rise Time ◽  
Beam Source ◽  
Intense Electron Beam ◽  
Intense Electron

Axial electric wake field inside the induction gap exited by the intense electron beam

2008 ◽  
Vol 32 (10) ◽  
pp. 842-845
Author(s):  
Zhang Kai-Zhi ◽  
Zhang Huang ◽  
Long Ji-Dong ◽  
Yang Guo-Jun ◽  
He Xiao-Zhong ◽  
...  
Keyword(s):  
Electron Beam ◽  
Wake Field ◽  
Intense Electron Beam ◽  
Intense Electron

Neutrons and Protons Production Due to the Interaction between Intense Electron Beam and the Target

1980 ◽  
Vol 48 (1) ◽  
pp. 295-300 ◽  
Author(s):  
Kazuo Imasaki ◽  
Shuji Miyamoto ◽  
Sadao Nakai ◽  
Chiyoe Yamanaka
Keyword(s):  
Electron Beam ◽  
Intense Electron Beam ◽  
Intense Electron

Design and Experiments of Hundred Joule-Level KrF Laser Pumped by Intense Electron Beam

1994 ◽  
pp. 675-678
Author(s):  
Yusheng Shan ◽  
Naiyan Wang ◽  
Naigong Zeng ◽  
Chuangzhi Zhou ◽  
Dawei Yang ◽  
...  
Keyword(s):  
Electron Beam ◽  
Krf Laser ◽  
Intense Electron Beam ◽  
Intense Electron
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