Pulsed electron-beam source for high-resolution high-throughput microlithography

1994 ◽  
Author(s):  
Tseng-Yang Hsu ◽  
Peyman Hadizad ◽  
Rong L. Liou ◽  
Greg Roth ◽  
Martin A. Gundersen
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
High Throughput ◽  
Beam Source ◽  
Pulsed Electron Beam

A high intensity pulsed electron beam source

1982 ◽  
Vol 63 (1-4) ◽  
pp. 191-195
Author(s):  
V. K. Rohatgi ◽  
S. K. Iyyengar ◽  
P. H. Ron ◽  
K. C. Mittal ◽  
A. S. Paithankar
Keyword(s):  
Electron Beam ◽  
High Intensity ◽  
Beam Source ◽  
Pulsed Electron Beam

High-throughput, high-resolution electron-beam lithography

1988 ◽  
Vol 32 (4) ◽  
pp. 494-501 ◽  
Author(s):  
H. C. Pfeiffer ◽  
T. R. Groves ◽  
T. H. Newman
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
High Throughput ◽  
Electron Beam Lithography ◽  
Resolution Electron
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