Novel x-ray mask distortion measurement technique employing holographic gratings and phase-shifting interferometry

M. E. Hansen

doi:10.1116/1.586020

Novel x-ray mask distortion measurement technique employing holographic gratings and phase-shifting interferometry

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586020 ◽

1992 ◽

Vol 10 (6) ◽

pp. 2657

Author(s):

M. E. Hansen

Keyword(s):

Measurement Technique ◽

Phase Shifting ◽

Holographic Gratings ◽

X Ray ◽

Phase Shifting Interferometry

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Novel x-ray mask distortion measurement technique employing holographic gratings and phase-shifting interferometry

Precision Engineering ◽

10.1016/0141-6359(94)90098-1 ◽

1994 ◽

Vol 16 (1) ◽

pp. 75-76

Keyword(s):

Measurement Technique ◽

Phase Shifting ◽

Holographic Gratings ◽

X Ray ◽

Phase Shifting Interferometry

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High-sensitivity x-ray mask damage studies employing holographic gratings and phase-shifting interferometry

10.1117/12.175831 ◽

1994 ◽

Author(s):

Matthew E. Hansen ◽

Franco Cerrina

Keyword(s):

High Sensitivity ◽

Phase Shifting ◽

Holographic Gratings ◽

X Ray ◽

Phase Shifting Interferometry

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Development of a Bright Peak Enhanced X-Ray Phase Shifting Mask BPEXPM

10.21236/ada412072 ◽

2003 ◽

Author(s):

Franco Cerrina ◽

James W. Taylor

Keyword(s):

Phase Shifting ◽

X Ray

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Threshold multi-secret sharing scheme based on phase-shifting interferometry

Optics Communications ◽

10.1016/j.optcom.2016.10.065 ◽

2017 ◽

Vol 387 ◽

pp. 409-414 ◽

Cited By ~ 3

Author(s):

Xiaopeng Deng ◽

Wei Wen ◽

Zhengang Shi

Keyword(s):

Secret Sharing ◽

Phase Shifting ◽

Secret Sharing Scheme ◽

Phase Shifting Interferometry ◽

Sharing Scheme ◽

Multi Secret Sharing

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Real-time demodulation scheme based on phase-shifting interferometry with error compensations for miniature Fabry-Perot acoustic sensors

10.1117/12.658017 ◽

2006 ◽

Cited By ~ 2

Author(s):

Zhong Chen ◽

Yuxiang Liu ◽

He Li ◽

Miao Yu

Keyword(s):

Real Time ◽

Phase Shifting ◽

Acoustic Sensors ◽

Phase Shifting Interferometry ◽

Fabry Perot

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Phase-shifting interferometry with uncalibrated phase shifts

Applied Optics ◽

10.1364/ao.39.000585 ◽

2000 ◽

Vol 39 (4) ◽

pp. 585 ◽

Cited By ~ 57

Author(s):

Xin Chen ◽

Maureen Gramaglia ◽

John A. Yeazell

Keyword(s):

Phase Shifts ◽

Phase Shifting ◽

Phase Shifting Interferometry

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Two-wavelength in-line phase-shifting interferometry based on polarizing separation for accurate surface profiling

Applied Optics ◽

10.1364/ao.50.006153 ◽

2011 ◽

Vol 50 (33) ◽

pp. 6153 ◽

Cited By ~ 40

Author(s):

D. G. Abdelsalam ◽

Daesuk Kim

Keyword(s):

Phase Shifting ◽

Surface Profiling ◽

Phase Shifting Interferometry

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Large surface profile measurement with instantaneous phase-shifting interferometry

Optical Engineering ◽

10.1117/1.1532331 ◽

2003 ◽

Vol 42 (2) ◽

pp. 367 ◽

Cited By ~ 22

Author(s):

N. R. Sivakumar

Keyword(s):

Surface Profile ◽

Phase Shifting ◽

Profile Measurement ◽

Instantaneous Phase ◽

Phase Shifting Interferometry ◽

Surface Profile Measurement

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A hybrid method of phase shifting interferometry and optical tomographic techniques for determining the optical anisotropy of grafted nylon-6 fibres with PMMA polymer

Optik ◽

10.1016/j.ijleo.2021.168485 ◽

2021 ◽

pp. 168485

Author(s):

Taha Z.N. Sokkar ◽

Mohammed A. El-Bakary ◽

Mohammed I. Raslan ◽

Muhamed A. Sewidan ◽

Ahmed A. Hamza

Keyword(s):

Hybrid Method ◽

Optical Anisotropy ◽

Nylon 6 ◽

Phase Shifting ◽

Phase Shifting Interferometry ◽

Pmma Polymer

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Dynamic refractive index distribution measurement of dynamic process by combining dual-channel simultaneous phase-shifting interferometry and total internal reflection

Scientific Reports ◽

10.1038/s41598-018-33299-w ◽

2018 ◽

Vol 8 (1) ◽

Cited By ~ 2

Author(s):

Yunfei Zhou ◽

Haoren Zou ◽

Liyun Zhong ◽

Jiaosheng Li ◽

Bingbo Li ◽

...

Keyword(s):

Refractive Index ◽

Dynamic Process ◽

Total Internal Reflection ◽

Internal Reflection ◽

Phase Shifting ◽

Refractive Index Distribution ◽

Distribution Measurement ◽

Phase Shifting Interferometry ◽

Dual Channel ◽

Index Distribution

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