Development of a Bright Peak Enhanced X-Ray Phase Shifting Mask BPEXPM

2003 ◽  
Author(s):  
Franco Cerrina ◽  
James W. Taylor
Keyword(s):  
Phase Shifting ◽  
X Ray

X-Ray Phase-Shifting Mask for 0.1-µm Pattern Replication under a Large Proximity Gap Condition

1992 ◽  
Vol 31 (Part 1, No. 12B) ◽  
pp. 4221-4227 ◽  
Author(s):  
Yoh Somemura ◽  
Kimiyoshi Deguchi ◽  
Kazunori Miyoshi ◽  
Tadahito Matsuda
Keyword(s):  
Phase Shifting ◽  
X Ray

A method of hard X-ray phase-shifting digital holography

2016 ◽  
Vol 23 (4) ◽  
pp. 1024-1029
Author(s):  
So Yeong Park ◽  
Chung Ki Hong ◽  
Jun Lim
Keyword(s):  
Phase Shift ◽  
Digital Holography ◽  
Relative Phase ◽  
Test Pattern ◽  
Fresnel Lens ◽  
Phase Shifting ◽  
New Method ◽  
Phase Plate ◽  
X Ray ◽  
Line Type

A new method of phase-shifting digital holography is demonstrated in the hard X-ray region. An in-line-type phase-shifting holography setup was installed in a 6.80 keV hard X-ray synchrotron beamline. By placing a phase plate consisting of a hole and a band at the focusing point of a Fresnel lens, the relative phase of the reference and objective beams could be successfully shifted for use with a three-step phase-shift algorithm. The system was verified by measuring the shape of a gold test pattern and a silica sphere.

Processing latitude study on x-ray phase-shifting masks

2000 ◽  
Author(s):  
Lei Yang ◽  
Mumit Khan ◽  
James W. Taylor ◽  
Yuli Vladimirsky ◽  
Niru V. Dandekar
Keyword(s):  
Phase Shifting ◽  
X Ray

Phase-Shifting X-Ray Shearing Interferometer

1999 ◽  
Vol 38 (Part 1, No. 11) ◽  
pp. 6535-6539 ◽  
Author(s):  
Koichi Iwata ◽  
Hisao Kikuta ◽  
Hiroyuki Tadano ◽  
Hideki Hagino ◽  
Takashi Nakano
Keyword(s):  
Phase Shifting ◽  
X Ray

Precise and accurate characterization of DUV and V-UV phase shifting mask materials by combined V-UV spectroscopic ellipsometry and x-ray reflectometry

2002 ◽  
Author(s):  
Pierre Boher ◽  
Adrien Darragon ◽  
Christophe Defranoux ◽  
Jean-Claude Fouere ◽  
Jean-Louis P. Stehle
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Phase Shifting ◽  
X Ray
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