An investigation of some depth of focus issues in high numerical aperture projection lithography system by experiment and simulation

1990 ◽  
Vol 8 (6) ◽  
pp. 1735 ◽  
Author(s):  
C. A. Spence
Keyword(s):  
Numerical Aperture ◽  
Depth Of Focus ◽  
High Numerical Aperture ◽  
Projection Lithography ◽  
Experiment And Simulation ◽  
Lithography System

scholarly journals Formation of an elongated region of energy backflow using ring apertures

2019 ◽  
Vol 43 (2) ◽  
pp. 193-199
Author(s):  
S.S. Stafeev ◽  
V.V. Kotlyar
Keyword(s):  
Energy Flow ◽  
Poynting Vector ◽  
Numerical Aperture ◽  
Second Order ◽  
Depth Of Focus ◽  
Incident Wavelength ◽  
Entrance Pupil ◽  
High Numerical Aperture ◽  
Vector Beam ◽  
Cylindrical Vector Beam

In this paper, we have investigated the focusing of a second-order cylindrical vector beam by using a high numerical aperture (NA) lens limited by a ring aperture using the Richards-Wolf formulae. It was shown that the range of negative on-axis projections of the Poynting vector could be increased by increasing the depth of focus through the use of a ring aperture. It was shown that when focusing light with a lens with NA = 0.95, the use of a ring aperture limiting the entrance pupil angle to 0.9 of maximum, allows the depth of the region of negative on-axis Poynting vector projections to be four times increased, with the region width remaining almost unchanged and varying from 0.357 to 0.352 of the incident wavelength. Notably, the magnitude of the reverse energy flow was found to be larger than the direct one by a factor of 2.5.

scholarly journals Focal Surface Detection of High Numerical Aperture Objective Lens Based on Differential Astigmatic Method

2021 ◽  
Vol 13 (4) ◽  
pp. 1-8
Author(s):  
Jia-Lin Du ◽  
Wei Yan ◽  
Li-Wei Liu ◽  
Fan-Xing Li ◽  
Fu-Ping Peng ◽  
...  
Keyword(s):  
Numerical Aperture ◽  
Objective Lens ◽  
High Numerical Aperture ◽  
Surface Detection ◽  
Focal Surface

High-numerical-aperture silica core fibers

2004 ◽  
Author(s):  
Bolesh J. Skutnik ◽  
Brian Foley ◽  
Kelly B. Moran
Keyword(s):  
Numerical Aperture ◽  
High Numerical Aperture ◽  
Silica Core
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