Selective area nucleation for metal chemical vapor deposition using focused ion beams

1988 ◽  
Vol 6 (6) ◽  
pp. 1865 ◽  
Author(s):  
R. L. Kubena
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Ion Beams ◽  
Focused Ion Beams ◽  
Selective Area

Selective area synthesis of aligned carbon nanofibers by laser-assisted catalytic chemical vapor deposition

2007 ◽  
Vol 16 (8) ◽  
pp. 1541-1549 ◽  
Author(s):  
Rémi Longtin ◽  
Louis-Philippe Carignan ◽  
Christian Fauteux ◽  
Daniel Therriault ◽  
Joseph Pegna
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanofibers ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Catalytic Chemical Vapor Deposition ◽  
Selective Area

Selective area deposition of diamond thin films on patterns of porous silicon by hot‐filament chemical vapor deposition

1995 ◽  
Vol 67 (24) ◽  
pp. 3557-3559 ◽  
Author(s):  
S. Mirzakuchaki ◽  
M. Hajsaid ◽  
H. Golestanian ◽  
R. Roychoudhury ◽  
E. J. Charlson ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Porous Silicon ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Selective Area ◽  
Diamond Thin Films ◽  
Hot Filament ◽  
Area Deposition

scholarly journals Fabrication of Micron Scale Magnetic Nickel Features by Selective Area Organometallic Chemical Vapor Deposition

1997 ◽  
Vol 475 ◽  
Author(s):  
D. Welipitiya ◽  
C. N. Borca ◽  
P. A. Dowben ◽  
I. Gobulukoglu ◽  
Hong Jiang ◽  
...  
Keyword(s):  
Magnetic Properties ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Magnetic Measurements ◽  
Chemical Vapor ◽  
Gradient Force ◽  
Selective Area ◽  
Wide Range ◽  
Radiation Induced ◽  
Organometallic Chemical Vapor Deposition

AbstractWe demonstrate that it is possible to deposit a wide range of magnetic features, using photoassisted and electron radiation induced selective area organometallic chemical vapor deposition. Large arrays of identical micron to nano scale Ni features were deposited by these methods. Their magnetic properties were studied by alternating gradient force magnetometry as well as magnetic force microscopy. Our morphological and magnetic measurements show that the structures are spatially well defined, and the magnetic properties are related to the structural shapes of the features.

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