Selective area growth of InP on lithography-free, nanopatterned GaAs(001) by metalorganic chemical vapor deposition

Qi Wang; Zhiqiang Bian; Zhigang Jia; Zhihong Pan; Shiwei Cai; Yongqing Huang; Xiaomin Ren

doi:10.1116/1.4855035

Selective area growth of InP on lithography-free, nanopatterned GaAs(001) by metalorganic chemical vapor deposition

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.4855035 ◽

2014 ◽

Vol 32 (1) ◽

pp. 011210 ◽

Cited By ~ 1

Author(s):

Qi Wang ◽

Zhiqiang Bian ◽

Zhigang Jia ◽

Zhihong Pan ◽

Shiwei Cai ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Selective Area ◽

Area Growth ◽

Metalorganic Chemical

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Mechanism of selective area growth of GaN nanorods by pulsed mode metalorganic chemical vapor deposition

Nanotechnology ◽

10.1088/0957-4484/23/46/465601 ◽

2012 ◽

Vol 23 (46) ◽

pp. 465601 ◽

Cited By ~ 35

Author(s):

Yen-Ting Lin ◽

Ting-Wei Yeh ◽

P Daniel Dapkus

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Selective Area ◽

Pulsed Mode ◽

Area Growth ◽

Metalorganic Chemical

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Fabrication and modeling of optical interconnects using selective area growth metalorganic chemical vapor deposition

Conference Digest. ISLC 1998 NARA. 1998 IEEE 16th International Semiconductor Laser Conference (Cat. No. 98CH361130) ◽

10.1109/islc.1998.734204 ◽

2002 ◽

Author(s):

M.A. Alam ◽

R. People ◽

S.K. Sputz ◽

M.S. Hybertsen ◽

E. Isaacs ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Optical Interconnects ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Selective Area ◽

Area Growth ◽

Metalorganic Chemical

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Index guided single stripe lasers fabricated by selective area growth in a metalorganic chemical vapor deposition system

Journal of Applied Physics ◽

10.1063/1.339426 ◽

1987 ◽

Vol 62 (6) ◽

pp. 2569-2570 ◽

Cited By ~ 2

Author(s):

J. J. Yang ◽

S. S. Ou ◽

M. Jansen ◽

J. Wilcox ◽

M. Sergant

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Selective Area ◽

Area Growth ◽

Metalorganic Chemical

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Metalorganic chemical vapor deposition of GaN nanowires: From catalyst-assisted to catalyst-free growth, and from self-assembled to selective-area growth

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2016.03.025 ◽

2016 ◽

Vol 55 ◽

pp. 51-58 ◽

Cited By ~ 7

Author(s):

Blandine Alloing ◽

Jesús Zúñiga-Pérez

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Gan Nanowires ◽

Selective Area ◽

Area Growth ◽

Free Growth ◽

Metalorganic Chemical

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Selective area growth of GaN nanowires using metalorganic chemical vapor deposition on nano-patterned Si(111) formed by the etching of nano-sized Au droplets

Thin Solid Films ◽

10.1016/j.tsf.2011.06.083 ◽

2011 ◽

Vol 520 (1) ◽

pp. 126-130 ◽

Cited By ~ 5

Author(s):

Ki-Young Song ◽

R. Navamathavan ◽

Ji-Hyeon Park ◽

Yeom-Bo Ra ◽

Yong-Ho Ra ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Gan Nanowires ◽

Selective Area ◽

Area Growth ◽

Metalorganic Chemical

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Selective area growth and characterization of AlGaN/GaN heterojunction bipolar transistors by metalorganic chemical vapor deposition

IEEE Transactions on Electron Devices ◽

10.1109/16.906441 ◽

2001 ◽

Vol 48 (3) ◽

pp. 490-494 ◽

Cited By ~ 29

Author(s):

B.S. Shelton ◽

D.J.H. Lambert ◽

Jian Jang Huang ◽

M.M. Wong ◽

U. Chowdhury ◽

...

Keyword(s):

Heterojunction Bipolar Transistors ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Bipolar Transistors ◽

Selective Area Growth ◽

Selective Area ◽

Area Growth ◽

Metalorganic Chemical

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Size-independent low voltage of InGaN micro-light-emitting diodes with epitaxial tunnel junctions using selective area growth by metalorganic chemical vapor deposition

Optics Express ◽

10.1364/oe.394664 ◽

2020 ◽

Vol 28 (13) ◽

pp. 18707

Author(s):

Panpan Li ◽

Haojun Zhang ◽

Hongjian Li ◽

Mike Iza ◽

Yifan Yao ◽

...

Keyword(s):

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Low Voltage ◽

Tunnel Junctions ◽

Chemical Vapor ◽

Selective Area Growth ◽

Light Emitting ◽

Selective Area ◽

Area Growth ◽

Metalorganic Chemical

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Nanopores and quantum dots by selective area metalorganic chemical vapor deposition

IEEE Photonics Conference 2012 ◽

10.1109/ipcon.2012.6358853 ◽

2012 ◽

Author(s):

J.J. Coleman

Keyword(s):

Quantum Dots ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area ◽

Metalorganic Chemical

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Hexagonal-Facet Laser with Optical Waveguides Grown by Selective Area Metalorganic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.34.l4 ◽

1995 ◽

Vol 34 (Part 2, No. 1A) ◽

pp. L4-L6 ◽

Cited By ~ 24

Author(s):

Seigo Ando ◽

Naoki Kobayashi ◽

Hiroaki Ando

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Optical Waveguides ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area ◽

Metalorganic Chemical

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Analytical solution of thickness variations in selective area growth by organometallic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.3157266 ◽

2009 ◽

Vol 94 (25) ◽

pp. 253112 ◽

Cited By ~ 3

Author(s):

X. Liu ◽

D. E. Aspnes

Keyword(s):

Chemical Vapor Deposition ◽

Analytical Solution ◽

Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Selective Area ◽

Area Growth ◽

Thickness Variations ◽

Organometallic Chemical Vapor Deposition

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