Analytical solution of thickness variations in selective area growth by organometallic chemical vapor deposition

2009 ◽  
Vol 94 (25) ◽  
pp. 253112 ◽  
Author(s):  
X. Liu ◽  
D. E. Aspnes
Keyword(s):  
Chemical Vapor Deposition ◽  
Analytical Solution ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Selective Area Growth ◽  
Selective Area ◽  
Area Growth ◽  
Thickness Variations ◽  
Organometallic Chemical Vapor Deposition

Thermally stable heavily boron-doped diamond resistors fabricated via selective area growth by hot-filament chemical vapor deposition

2019 ◽  
Vol 680 ◽  
pp. 81-84
Author(s):  
Shin-ichiro Suzuki ◽  
Shinya Ohmagari ◽  
Hiroyuki Kawashima ◽  
Takeyasu Saito ◽  
Hitoshi Umezawa ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Selective Area Growth ◽  
Thermally Stable ◽  
Boron Doped Diamond ◽  
Selective Area ◽  
Boron Doped ◽  
Area Growth ◽  
Hot Filament

Submicron-scale diamond selective-area growth by hot-filament chemical vapor deposition

2016 ◽  
Vol 615 ◽  
pp. 239-242 ◽  
Author(s):  
Shinya Ohmagari ◽  
Takeshi Matsumoto ◽  
Hitoshi Umezawa ◽  
Yoshiaki Mokuno
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Selective Area Growth ◽  
Selective Area ◽  
Submicron Scale ◽  
Area Growth ◽  
Hot Filament
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