A new ultrafine groove fabrication method utilizing electron cyclotron resonance plasma deposition and reactive ion etching

1988 ◽  
Vol 6 (2) ◽  
pp. 533 ◽  
Author(s):  
Shigehisa Ohki
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Deposition ◽  
Reactive Ion Etching ◽  
Electron Cyclotron ◽  
Fabrication Method ◽  
Ion Etching ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Mechanism of Reactive Ion Etching Lag inWSi2Etching Using Electron Cyclotron Resonance Plasma

1994 ◽  
Vol 33 (Part 1, No. 4B) ◽  
pp. 2170-2174 ◽  
Author(s):  
Takahiro Maruyama ◽  
Nobuo Fujiwara ◽  
Masahiro Yoneda ◽  
Katsuhiro Tsukamoto ◽  
Toshinobu Banjo
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Reactive Ion Etching ◽  
Electron Cyclotron ◽  
Ion Etching ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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