Growth mechanism of thin oxide films under low-energy oxygen-ion bombardment

1988 ◽  
Vol 6 (1) ◽  
pp. 466 ◽  
Author(s):  
S. S. Todorov
Keyword(s):  
Growth Mechanism ◽  
Oxide Films ◽  
Ion Bombardment ◽  
Low Energy ◽  
Oxygen Ion ◽  
Thin Oxide Films ◽  
Thin Oxide

scholarly journals Formation of Thin Si Oxide Films on n-Type Si(100) Substrates Prepared by Low-Energy Oxygen Ion Bombardment.

Shinku ◽  
1992 ◽  
Vol 35 (1) ◽  
pp. 8-14
Author(s):  
Kouichi USAMI ◽  
Hiroshi OKABE ◽  
Tadayuki KOBAYASHI ◽  
Kuniyoshi YOKOO ◽  
Toshinari GOTO
Keyword(s):  
Oxide Films ◽  
Ion Bombardment ◽  
Low Energy ◽  
Oxygen Ion
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