Characteristics of Nb-based tunnel junctions fabricated by selective trilayer ion-beam etching process

1987 ◽  
Vol 5 (6) ◽  
pp. 1569
Author(s):  
H. Tsuge
Keyword(s):  
Tunnel Junctions ◽  
Ion Beam ◽  
Etching Process ◽  
Ion Beam Etching

Effect of Ar ion beam channeling on AlGaN/GaN heterostructures during the ion beam etching process

2000 ◽  
Vol 76 (14) ◽  
pp. 1899-1901 ◽  
Author(s):  
O. Breitschädel ◽  
J. T. Hsieh ◽  
B. Kuhn ◽  
F. Scholz ◽  
H. Schweizer
Keyword(s):  
Ion Beam ◽  
Etching Process ◽  
Ion Beam Etching

Fabrication of ramp-type junctions using a two angle ion beam etching process

1999 ◽  
Vol 12 (11) ◽  
pp. 1016-1019 ◽  
Author(s):  
U Schoop ◽  
M Schonecke ◽  
S Schymon ◽  
T Bauch ◽  
A Marx ◽  
...  
Keyword(s):  
Ion Beam ◽  
Etching Process ◽  
Ion Beam Etching

Simple Kinetic Model of ECR Reactive Ion Beam Etching Reactor for the Optimization of GaAs Etching Process

1996 ◽  
Vol 35 (Part 1, No. 2B) ◽  
pp. 1235-1241 ◽  
Author(s):  
Masakazu Sugiyama ◽  
Takayuki Yamaizumi ◽  
Masahiro Nezuka ◽  
Yukihiro Shimogaki ◽  
Yoshiaki Nakano ◽  
...  
Keyword(s):  
Kinetic Model ◽  
Ion Beam ◽  
Etching Process ◽  
Ion Beam Etching ◽  
Simple Kinetic Model ◽  
Reactive Ion Beam Etching

Highly selective argon–oxygen ion beam etching process for Pb alloys

1985 ◽  
Vol 3 (4) ◽  
pp. 1844-1848 ◽  
Author(s):  
D. F. Moore ◽  
H. P. Dietrich ◽  
A. W. Kleinsasser ◽  
J. M. E. Harper
Keyword(s):  
Ion Beam ◽  
Etching Process ◽  
Ion Beam Etching ◽  
Oxygen Ion

Multi-step ion beam etching of sub-30 nm magnetic tunnel junctions for reducing leakage and MgO barrier damage

2012 ◽  
Vol 111 (7) ◽  
pp. 07C722 ◽  
Author(s):  
Sung-woo Chun ◽  
Daehong Kim ◽  
Jihun Kwon ◽  
Bongho Kim ◽  
Seonjun Choi ◽  
...  
Keyword(s):  
Tunnel Junctions ◽  
Ion Beam ◽  
Magnetic Tunnel Junctions ◽  
Ion Beam Etching
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