The role of gas phase reactions, electron impact, and collisional energy transfer processes relevant to plasma etching of polysilicon with H2 and Cl2

Ole Krogh

doi:10.1116/1.583508

The role of gas phase reactions, electron impact, and collisional energy transfer processes relevant to plasma etching of polysilicon with H2 and Cl2

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.583508 ◽

1986 ◽

Vol 4 (6) ◽

pp. 1292 ◽

Cited By ~ 13

Author(s):

Ole Krogh

Keyword(s):

Energy Transfer ◽

Gas Phase ◽

Electron Impact ◽

Plasma Etching ◽

Gas Phase Reactions ◽

Transfer Processes ◽

Collisional Energy ◽

Collisional Energy Transfer

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ChemInform Abstract: Gas-Phase 1H NMR Studies of Cyclohexane Collisional Energy Transfer in the Bimolecular Region.

ChemInform ◽

10.1002/chin.199116043 ◽

2010 ◽

Vol 22 (16) ◽

pp. no-no

Author(s):

P. O. MORENO ◽

N. S. TRUE

Keyword(s):

Energy Transfer ◽

Gas Phase ◽

1H Nmr ◽

Nmr Studies ◽

Collisional Energy ◽

Collisional Energy Transfer

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Gas-phase proton NMR studies of cyclohexane collisional energy transfer in the bimolecular region

The Journal of Physical Chemistry ◽

10.1021/j100154a015 ◽

1991 ◽

Vol 95 (1) ◽

pp. 57-62 ◽

Cited By ~ 6

Author(s):

Phillip O. Moreno ◽

Nancy S. True

Keyword(s):

Energy Transfer ◽

Gas Phase ◽

Proton Nmr ◽

Nmr Studies ◽

Collisional Energy ◽

Collisional Energy Transfer

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Probing Gas-Phase Collisional Energy Transfer with Picosecond Laser Spectroscopy

Conference on Lasers and Electro-Optics/International Quantum Electronics Conference ◽

10.1364/cleo.2009.ctua1 ◽

2009 ◽

Author(s):

Thomas B. Settersten

Keyword(s):

Energy Transfer ◽

Gas Phase ◽

Laser Spectroscopy ◽

Picosecond Laser ◽

Collisional Energy ◽

Collisional Energy Transfer

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Collisional Energy Transfer in the Gas Phase by Classical Trajectory Calculations

Theory of Chemical Reaction Dynamics - NATO Science Series II: Mathematics, Physics and Chemistry ◽

10.1007/1-4020-2165-8_21 ◽

2006 ◽

pp. 435-446 ◽

Cited By ~ 1

Author(s):

V. Bernstein ◽

I. Oref

Keyword(s):

Energy Transfer ◽

Gas Phase ◽

Classical Trajectory ◽

Collisional Energy ◽

Trajectory Calculations ◽

Collisional Energy Transfer

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Collisional energy transfer of highly vibrationally excited NO2: The role of intramolecular vibronic coupling and the transition dipole coupling mechanism

The Journal of Chemical Physics ◽

10.1063/1.474648 ◽

1997 ◽

Vol 107 (8) ◽

pp. 2890-2902 ◽

Cited By ~ 36

Author(s):

Gregory V. Hartland ◽

Dong Qin ◽

Hai-Lung Dai ◽

Carl Chen

Keyword(s):

Energy Transfer ◽

Vibronic Coupling ◽

Coupling Mechanism ◽

Vibrationally Excited ◽

Transition Dipole ◽

Dipole Coupling ◽

Collisional Energy ◽

Collisional Energy Transfer

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Collisional energy transfer in polyatomic molecules in the gas phase

Israel Journal of Chemistry ◽

10.1560/ijc.47.2.205 ◽

2007 ◽

Vol 47 (2) ◽

pp. 205-214 ◽

Cited By ~ 13

Author(s):

Victor Bernshtein ◽

Izhack Oref

Keyword(s):

Energy Transfer ◽

Gas Phase ◽

Polyatomic Molecules ◽

Collisional Energy ◽

Collisional Energy Transfer

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Collisional energy-transfer processes involving van der waals bonds

Chemical Physics Letters ◽

10.1016/0009-2614(87)80451-7 ◽

1987 ◽

Vol 140 (3) ◽

pp. 243-249 ◽

Cited By ~ 5

Author(s):

Y.O. Koh ◽

Y.H. Kim ◽

H.K. Shin

Keyword(s):

Energy Transfer ◽

Van Der Waals ◽

Transfer Processes ◽

Collisional Energy ◽

Collisional Energy Transfer

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Imaging of molecular mixing in a gas-phase turbulent jet by collisional energy-transfer fluorescence

10.2514/6.1992-381 ◽

1992 ◽

Cited By ~ 3

Author(s):

M. WINTER ◽

J. HERMANSON ◽

G. DOBBS

Keyword(s):

Energy Transfer ◽

Gas Phase ◽

Turbulent Jet ◽

Molecular Mixing ◽

Collisional Energy ◽

Collisional Energy Transfer

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Collisional Energy Transfer of Highly Vibrationally Excited Molecules: The Role of Long-Range Interaction and Intramolecular Vibronic Coupling

ACS Symposium Series - Highly Excited Molecules ◽

10.1021/bk-1997-0678.ch018 ◽

1997 ◽

pp. 266-274 ◽

Cited By ~ 2

Author(s):

Hai-Lung Dai

Keyword(s):

Energy Transfer ◽

Long Range ◽

Vibronic Coupling ◽

Vibrationally Excited ◽

Range Interaction ◽

Collisional Energy ◽

Long Range Interaction ◽

Excited Molecules ◽

Collisional Energy Transfer

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Laser induced collisional energy transfer processes in a rubidium-potassium mixture

Optics Communications ◽

10.1016/0030-4018(85)90124-5 ◽

1985 ◽

Vol 54 (1) ◽

pp. 7-11 ◽

Cited By ~ 6

Author(s):

B. Cheron ◽

S. Mosaddak

Keyword(s):

Energy Transfer ◽

Transfer Processes ◽

Collisional Energy ◽

Collisional Energy Transfer

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