Hollow cathode etching with CF4 gas mixtures

Author(s):  
Chris M. Horwitz
Keyword(s):  
1979 ◽  
Vol 35 (4) ◽  
pp. 317-319 ◽  
Author(s):  
R. Solanki ◽  
E. L. Latush ◽  
F D. C. Gerstenberger ◽  
W. M. Fairbank ◽  
G.J. Collins

1979 ◽  
Vol 40 (C7) ◽  
pp. C7-229-C7-230
Author(s):  
N. N. Rykalin ◽  
A. V. Nikolaev ◽  
A. P. Borzhov

1983 ◽  
Vol 44 (C7) ◽  
pp. C7-479-C7-487 ◽  
Author(s):  
M. Broglia ◽  
F. Catoni ◽  
P. Zampetti

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