Hollow cathode etching with CF4 gas mixtures
1985 ◽
Vol 3
(1)
◽
pp. 419
◽
1916 ◽
Vol 81
(2101supp)
◽
pp. 227-227
Keyword(s):
1972 ◽
Vol 33
(C1)
◽
pp. C1-51-C1-56
◽
1979 ◽
Vol 40
(C7)
◽
pp. C7-229-C7-230
1983 ◽
Vol 44
(C7)
◽
pp. C7-217-C7-225
◽
1983 ◽
Vol 44
(C7)
◽
pp. C7-479-C7-487
◽
1983 ◽
Vol 44
(C7)
◽
pp. C7-455-C7-460
2014 ◽
Vol 1
(1)
◽
pp. 7-25
◽