Growth of carbon nanotubes by microwave plasma-enhanced chemical vapor deposition at low temperature

2000 ◽  
Vol 18 (4) ◽  
pp. 1864-1868 ◽  
Author(s):  
Young Chul Choi ◽  
Dong Jae Bae ◽  
Young Hee Lee ◽  
Byung Soo Lee ◽  
Gyeong-Su Park ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor

In-situ Plasma Diagnosis of Chemical Species in Microwave Plasma-assisted Chemical Vapor Deposition for the Growth of Carbon Nanotubes Using CH4/H2/NH3 Gases

2000 ◽  
Vol 621 ◽  
Author(s):  
Y.S. Woo ◽  
I.T. Han ◽  
N.S. Lee ◽  
J.E. Jung ◽  
D.Y. Jeon ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Carbon Sources ◽  
Chemical Species ◽  
Chemical Vapor ◽  
Optical Emission ◽  
Multi Wall Carbon Nanotubes

ABSTRACTSynthesis of multi-wall carbon nanotubes (MWNTs) was attempted by microwave plasma enhanced chemical vapor deposition using CH4/H2/NH3 gases on Ni/Cr-coated glass at low temperature. The synthesis was investigated by optical emission spectroscopy and quadrupole mass spectroscopy. It was observed that MWNTs could be grown within a very restrictive range of gas compositions. An addition of a small amount of NH3 resulted in a decrease of C2H2, which can be used to estimate the amount of carbon sources in plasma for the growth of MWNTs, and an increase of CN and Hα radicals acting as etching species of carbon phases. These results show that carbon nanotubes can be grown only under an appropriate condition that the growing process surpasses the etching process. The optimum C2H2 /Hα ratio in a gas mixture was found to be between 1 and 3 for the MWNT growth at low temperature.

Chemical vapor deposition of nickel-group metals on multiwall carbon nanotubes

2007 ◽  
Vol 85 (10) ◽  
pp. 645-650 ◽  
Author(s):  
Maoqi Feng ◽  
Richard J Puddephatt
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Carbon Nanotube ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Multiwall Carbon Nanotubes ◽  
Chemical Vapor ◽  
Pt Films ◽  
Bimetallic Films ◽  
Multiwall Carbon

Chemical vapor deposition (CVD) of Ni, Pd, and Pt films and of Ni/Pd and Pd/Pt bimetallic films on multiwall carbon nanotubes (MWCNTs) can be effected at low temperature if the nanotubes are pretreated by CVD of titanium carbide. In the absence of the pretreatment, the CVD leads to formation of isolated nanoparticles of the nickel-group metals. The metallized MWCNTs are curved or kinked, as a result of the interaction with the metal. Preliminary oxidation of the carbon nanotubes allows easier metallization, and the bending of the metallated nanotubes is not observed in this case.Key words: Chemical vapor deposition, platinum, palladium, nickel, carbon, nanotube.

scholarly journals Synthesis of Multiwalled Carbon Nanotubes on Stainless Steel by Atmospheric Pressure Microwave Plasma Chemical Vapor Deposition

2020 ◽  
Vol 10 (13) ◽  
pp. 4468 ◽  
Author(s):  
Dashuai Li ◽  
Ling Tong ◽  
Bo Gao
Keyword(s):  
Carbon Nanotubes ◽  
Stainless Steel ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Atmospheric Pressure ◽  
Microwave Plasma ◽  
Hydrogen Plasma ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition

In this paper, we synthesize carbon nanotubes (CNTs) by using atmospheric pressure microwave plasma chemical vapor deposition (AMPCVD). In AMPCVD, a coaxial plasma generator provides 200 W 2.45 GHz microwave plasma at atmospheric pressure to decompose the precursor. A high-temperature tube furnace provides a suitable growth temperature for the deposition of CNTs. Optical fiber spectroscopy was used to measure the compositions of the argon–ethanol–hydrogen plasma. A comparative experiment of ethanol precursor decomposition, with and without plasma, was carried out to measure the role of the microwave plasma, showing that the 200 W microwave plasma can decompose 99% of ethanol precursor at any furnace temperature. CNTs were prepared on a stainless steel substrate by using the technology to decompose ethanol with the plasma power of 200 W at the temperatures of 500, 600, 700, and 800 °C; CNT growth increases with the increase in temperature. Prepared CNTs, analyzed by SEM and HRTEM, were shown to be multiwalled and tangled with each other. The measurement of XPS and Raman spectroscopy indicates that many oxygenated functional groups have attached to the surface of the CNTs.

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