Mass-resolved ion energy distributions in continuous dual mode microwave/radio frequency plasmas in argon and nitrogen

2000 ◽  
Vol 18 (3) ◽  
pp. 882-890 ◽  
Author(s):  
A. Hallil ◽  
O. Zabeida ◽  
M. R. Wertheimer ◽  
L. Martinu
Keyword(s):  
Radio Frequency ◽  
Dual Mode ◽  
Energy Distributions ◽  
Ion Energy ◽  
Microwave Radio ◽  
Ion Energy Distributions

Ion energy distributions in dual‐ and single‐mode microwave/radio‐frequency plasma

1995 ◽  
Vol 78 (8) ◽  
pp. 4855-4858 ◽  
Author(s):  
P. Reinke ◽  
S. Bureau ◽  
J. E. Klemberg‐Sapieha ◽  
L. Martinu
Keyword(s):  
Radio Frequency ◽  
Single Mode ◽  
Radio Frequency Plasma ◽  
Energy Distributions ◽  
Ion Energy ◽  
Frequency Plasma ◽  
Microwave Radio ◽  
Ion Energy Distributions

Ion energy distributions in radio‐frequency discharges

1991 ◽  
Vol 70 (1) ◽  
pp. 82-92 ◽  
Author(s):  
D. Field ◽  
D. F. Klemperer ◽  
P. W. May ◽  
Y. P. Song
Keyword(s):  
Radio Frequency ◽  
Energy Distributions ◽  
Ion Energy ◽  
Radio Frequency Discharges ◽  
Ion Energy Distributions
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