Langmuir probe measurements in a low pressure inductively coupled plasma used for diamond deposition

1999 ◽  
Vol 17 (3) ◽  
pp. 721-725 ◽  
Author(s):  
Katsuyuki Okada ◽  
Shojiro Komatsu ◽  
Seiichiro Matsumoto
Keyword(s):  
Langmuir Probe ◽  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Diamond Deposition ◽  
Inductively Coupled ◽  
Langmuir Probe Measurements ◽  
Probe Measurements

Diamond Deposition and Behavior of Atomic Carbon Species in a Low-Pressure Inductively Coupled Plasma

1999 ◽  
Vol 38 (Part 1, No. 7B) ◽  
pp. 4504-4507 ◽  
Author(s):  
Haruhiko Ito ◽  
Kungen Teii ◽  
Masayuki Ishikawa ◽  
Masafumi Ito ◽  
Masaru Hori ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Diamond Deposition ◽  
Atomic Carbon ◽  
Inductively Coupled ◽  
Carbon Species ◽  
And Behavior
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