Influence of finite geometrical asymmetry of the electrodes in capacitively coupled radio frequency plasma

B. Bora; L. Soto

doi:10.1063/1.4893148

Influence of finite geometrical asymmetry of the electrodes in capacitively coupled radio frequency plasma

Physics of Plasmas ◽

10.1063/1.4893148 ◽

2014 ◽

Vol 21 (8) ◽

pp. 083509 ◽

Cited By ~ 15

Author(s):

B. Bora ◽

L. Soto

Keyword(s):

Radio Frequency ◽

Radio Frequency Plasma ◽

Capacitively Coupled ◽

Frequency Plasma

Download Full-text

Observations of Electron Energy Distribution Functions and Ion Bombardment Secondary Electrons in a Capacitively Coupled Radio Frequency Plasma

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms1990.119.6_866 ◽

1999 ◽

Vol 119 (6) ◽

pp. 866-871 ◽

Cited By ~ 1

Author(s):

Yasunori Ohtsu ◽

Hiroharu Fujita

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Distribution Functions ◽

Radio Frequency Plasma ◽

Electron Energy Distribution ◽

Secondary Electrons ◽

Capacitively Coupled ◽

Frequency Plasma ◽

Energy Distribution Functions

Download Full-text

On the role of secondary electron emission in capacitively coupled radio‐frequency plasma sheath: A theoretical ground

Plasma Processes and Polymers ◽

10.1002/ppap.201900093 ◽

2019 ◽

Vol 16 (11) ◽

pp. 1900093 ◽

Cited By ~ 2

Author(s):

Guang‐Yu Sun ◽

Han‐Wei Li ◽

An‐Bang Sun ◽

Yuan Li ◽

Bai‐Peng Song ◽

...

Keyword(s):

Radio Frequency ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Plasma Sheath ◽

Theoretical Ground ◽

Radio Frequency Plasma ◽

Capacitively Coupled ◽

Frequency Plasma

Download Full-text

Corrigendum: Studies on the effect of finite geometrical asymmetry in dual capacitively coupled radio frequency plasma (2015 Plasma Sources Sci. Technol. 24 054002)

Plasma Sources Science and Technology ◽

10.1088/0963-0252/24/6/069501 ◽

2015 ◽

Vol 24 (6) ◽

pp. 069501

Author(s):

B Bora

Keyword(s):

Radio Frequency ◽

Radio Frequency Plasma ◽

Plasma Sources ◽

Capacitively Coupled ◽

Frequency Plasma

Download Full-text

A comparative investigation of some analytical performance characteristics of an inductively-coupled radio frequency plasma and a capacitively-coupled microwave plasma for solution analysis by emission spectrometry

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/0584-8547(75)80040-1 ◽

1975 ◽

Vol 30 (10-11) ◽

pp. 449-469 ◽

Cited By ~ 70

Author(s):

P.W.J.M. Boumans ◽

F.J. de Boer ◽

F.J. Dahmen ◽

H. Hoelzel ◽

A. Meier

Keyword(s):

Radio Frequency ◽

Microwave Plasma ◽

Comparative Investigation ◽

Performance Characteristics ◽

Analytical Performance ◽

Emission Spectrometry ◽

Radio Frequency Plasma ◽

Capacitively Coupled ◽

Inductively Coupled ◽

Frequency Plasma

Download Full-text

Hydrophobic over-recovery during aging of polyethylene modified by oxygen capacitively coupled radio frequency plasma: A new approach for stable superhydrophobic surface with high water adhesion

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2012.05.120 ◽

2012 ◽

Vol 206 (23) ◽

pp. 4952-4958 ◽

Cited By ~ 20

Author(s):

Y.P. Li ◽

S.Y. Li ◽

W. Shi ◽

M.K. Lei

Keyword(s):

Radio Frequency ◽

Superhydrophobic Surface ◽

High Water ◽

Radio Frequency Plasma ◽

New Approach ◽

Capacitively Coupled ◽

Frequency Plasma ◽

Water Adhesion

Download Full-text

A Novel Sustaining Mechanism in Capacitively Coupled Radio Frequency Plasma in Oxygen

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.4182 ◽

1998 ◽

Vol 37 (Part 1, No. 7A) ◽

pp. 4182-4185 ◽

Cited By ~ 9

Author(s):

Mari Shibata ◽

Toshiaki Makabe ◽

Nobuhiko Nakano

Keyword(s):

Radio Frequency ◽

Radio Frequency Plasma ◽

Capacitively Coupled ◽

Frequency Plasma

Download Full-text

Diagnostic of Capacitively Coupled Low Pressure Radio Frequency Plasma: An Approach through Electrical Discharge Characteristic

International Journal of Applied Physics and Mathematics ◽

10.7763/ijapm.2011.v1.24 ◽

2011 ◽

pp. 124-128 ◽

Cited By ~ 8

Author(s):

B. Bora ◽

H. Bhuyan ◽

M. Favre ◽

E. Wyndham ◽

H. Chuaqui

Keyword(s):

Radio Frequency ◽

Electrical Discharge ◽

Low Pressure ◽

Radio Frequency Plasma ◽

Discharge Characteristic ◽

Capacitively Coupled ◽

Frequency Plasma

Download Full-text

Unveiling the role of dielectric trap states on capacitively coupled radio-frequency plasma discharge: dynamic charging behaviors

Plasma Sources Science and Technology ◽

10.1088/1361-6595/abf321 ◽

2021 ◽

Author(s):

Shu Zhang ◽

Guangyu Sun ◽

Arnas Volčokas ◽

Guan-Jun Zhang ◽

Anbang Sun

Keyword(s):

Radio Frequency ◽

Plasma Discharge ◽

Radio Frequency Plasma ◽

Trap States ◽

Capacitively Coupled ◽

Frequency Plasma ◽

Dynamic Charging

Download Full-text

Transition of water adhesion on superhydrophobic surface during aging of polypropylene modified by oxygen capacitively coupled radio frequency plasma

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2012.10.037 ◽

2012 ◽

Vol 213 ◽

pp. 139-144 ◽

Cited By ~ 15

Author(s):

Y.P. Li ◽

W. Shi ◽

S.Y. Li ◽

M.K. Lei

Keyword(s):

Radio Frequency ◽

Superhydrophobic Surface ◽

Radio Frequency Plasma ◽

Capacitively Coupled ◽

Frequency Plasma ◽

Water Adhesion

Download Full-text

Diamond chemical vapor deposition from a capacitively coupled radio frequency plasma

Applied Physics Letters ◽

10.1063/1.113591 ◽

1995 ◽

Vol 66 (8) ◽

pp. 1018-1020 ◽

Cited By ~ 15

Author(s):

Richard B. Jackman ◽

Judith Beckman ◽

John S. Foord

Keyword(s):

Chemical Vapor Deposition ◽

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Capacitively Coupled ◽

Frequency Plasma ◽

Diamond Chemical Vapor Deposition

Download Full-text