Improved formation of silicon dioxide films in liquid phase deposition

C. J. Huang; M. P. Houng; Y. H. Wang; N. F. Wang; Jiann-Ruey Chen

doi:10.1116/1.581395

Improved formation of silicon dioxide films in liquid phase deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581395 ◽

1998 ◽

Vol 16 (4) ◽

pp. 2646-2652 ◽

Cited By ~ 25

Author(s):

C. J. Huang ◽

M. P. Houng ◽

Y. H. Wang ◽

N. F. Wang ◽

Jiann-Ruey Chen

Keyword(s):

Liquid Phase ◽

Silicon Dioxide ◽

Liquid Phase Deposition ◽

Silicon Dioxide Films

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Enhancement of metal–semiconductor barrier height with superthin silicon dioxide films deposited on gallium arsenide by liquid phase deposition

Journal of Applied Physics ◽

10.1063/1.1365057 ◽

2001 ◽

Vol 89 (11) ◽

pp. 6501-6505 ◽

Cited By ~ 7

Author(s):

C. J. Huang

Keyword(s):

Gallium Arsenide ◽

Liquid Phase ◽

Silicon Dioxide ◽

Barrier Height ◽

Liquid Phase Deposition ◽

Silicon Dioxide Films

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Characterization of Thermally Annealed Fluorinated Silicon Dioxide Films Prepared by Liquid-Phase Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.44.l220 ◽

2005 ◽

Vol 44 (No. 6) ◽

pp. L220-L223 ◽

Cited By ~ 9

Author(s):

Ming-Kwei Lee ◽

Chung-Min Shih ◽

Shu-Ming Chang ◽

Hong-Chi Wang ◽

Jung-Jie Huang

Keyword(s):

Liquid Phase ◽

Silicon Dioxide ◽

Liquid Phase Deposition ◽

Silicon Dioxide Films

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High Quality Fluorinated Silicon Dioxide Films Prepared by Temperature-Difference-Based Liquid-Phase Deposition with Ammonium Hydroxide Incorporation

Journal of The Electrochemical Society ◽

10.1149/1.1540064 ◽

2003 ◽

Vol 150 (3) ◽

pp. F29

Author(s):

Ming-Kwei Lee ◽

Wu-Hung Shieh ◽

Chung-Min Shih ◽

Shuo-Yen Lin ◽

Kuan-Wen Tung

Keyword(s):

Liquid Phase ◽

Silicon Dioxide ◽

Temperature Difference ◽

Ammonium Hydroxide ◽

Liquid Phase Deposition ◽

High Quality ◽

Silicon Dioxide Films

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Effect of a chemical modification on growth silicon dioxide films on gallium arsenide prepared by the liquid phase deposition method

Journal of Applied Physics ◽

10.1063/1.371805 ◽

1999 ◽

Vol 86 (12) ◽

pp. 7151-7155 ◽

Cited By ~ 21

Author(s):

C. J. Huang ◽

M. P. Houng ◽

Y. H. Wang ◽

H. H. Wang

Keyword(s):

Gallium Arsenide ◽

Liquid Phase ◽

Chemical Modification ◽

Silicon Dioxide ◽

Liquid Phase Deposition ◽

Deposition Method ◽

Silicon Dioxide Films

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Liquid-Phase Deposition of Silicon-Dioxide Films using Tetra-Ethyl Orthosilicate

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.l97 ◽

1998 ◽

Vol 37 (Part 2, No. 1A/B) ◽

pp. L97-L99 ◽

Cited By ~ 2

Author(s):

Koh-ichi Usami ◽

Shin Hayashi ◽

Yasutaka Uchida ◽

Masakiyo Matsumura

Keyword(s):

Liquid Phase ◽

Silicon Dioxide ◽

Liquid Phase Deposition ◽

Silicon Dioxide Films ◽

Tetra Ethyl Orthosilicate

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Amorphous-silicon thin-film transistor with liquid phase deposition of silicon dioxide gate insulator

IEEE Electron Device Letters ◽

10.1109/55.748913 ◽

1999 ◽

Vol 20 (3) ◽

pp. 138-139 ◽

Cited By ~ 6

Author(s):

Jiun-Lin Yeh ◽

Si-Chen Lee

Keyword(s):

Thin Film ◽

Liquid Phase ◽

Silicon Dioxide ◽

Amorphous Silicon ◽

Thin Film Transistor ◽

Gate Insulator ◽

Liquid Phase Deposition ◽

Silicon Thin Film

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Silicon dioxide passivation of gallium arsenide by liquid phase deposition

Materials Chemistry and Physics ◽

10.1016/s0254-0584(00)00463-6 ◽

2001 ◽

Vol 70 (1) ◽

pp. 78-83 ◽

Cited By ~ 19

Author(s):

C.J. Huang ◽

Jiann-Ruey Chen ◽

S.P. Huang

Keyword(s):

Gallium Arsenide ◽

Liquid Phase ◽

Silicon Dioxide ◽

Liquid Phase Deposition

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Silicon Dioxide Deposited by Using Liquid Phase Deposition at Room Temperature for Nanometer-Scaled Isolation Technology

Journal of the Korean Physical Society ◽

10.3938/jkps.51.1191 ◽

2007 ◽

Vol 51 (3) ◽

pp. 1191 ◽

Cited By ~ 5

Author(s):

Kyoung Seob Kim ◽

Yonghan Roh

Keyword(s):

Liquid Phase ◽

Silicon Dioxide ◽

Room Temperature ◽

Liquid Phase Deposition

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Liquid Phase Deposition of Silicon Dioxide on the Silica Beads Array as Nanostructured Surface

Science of Advanced Materials ◽

10.1166/sam.2017.2560 ◽

2017 ◽

Vol 9 (2) ◽

pp. 262-267 ◽

Cited By ~ 1

Author(s):

Seo Young Yoon ◽

Yi-Seul Park ◽

Jin Seok Lee

Keyword(s):

Liquid Phase ◽

Silicon Dioxide ◽

Liquid Phase Deposition ◽

Nanostructured Surface ◽

Silica Beads

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Investigation of Low-Temperature Deposition of Silicon Dioxide on Indium Phosphide by Liquid Phase Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.6071 ◽

1999 ◽

Vol 38 (Part 1, No. 10) ◽

pp. 6071-6072 ◽

Cited By ~ 1

Author(s):

Na-Fu Wang ◽

Mau-Phon Houng ◽

Yeong-Her Wang

Keyword(s):

Liquid Phase ◽

Low Temperature ◽

Indium Phosphide ◽

Silicon Dioxide ◽

Liquid Phase Deposition ◽

Low Temperature Deposition ◽

Temperature Deposition

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