Evaluation of the ion bombardment energy for growing diamondlike carbon films in an electron cyclotron resonance plasma enhanced chemical vapor deposition

Dae-Hwan Kang; Seung-Chul Ha; Ki-Bum Kim; Seok-Hong Min

doi:10.1116/1.581392

Evaluation of the ion bombardment energy for growing diamondlike carbon films in an electron cyclotron resonance plasma enhanced chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581392 ◽

1998 ◽

Vol 16 (4) ◽

pp. 2625-2631 ◽

Cited By ~ 8

Author(s):

Dae-Hwan Kang ◽

Seung-Chul Ha ◽

Ki-Bum Kim ◽

Seok-Hong Min

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Ion Bombardment ◽

Carbon Films ◽

Diamondlike Carbon ◽

Bombardment Energy ◽

Resonance Plasma

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Characterization of diamondlike carbon films grown by super‐wide electron‐cyclotron resonance plasma assisted chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579286 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1068-1071 ◽

Cited By ~ 4

Author(s):

A. Ishii ◽

S. Amadatsu ◽

S. Minomo ◽

M. Taniguchi ◽

M. Sugiyo ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamondlike Carbon ◽

Resonance Plasma

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Deposition of Diamondlike Carbon Films Using Electron Cyclotron Resonance Plasma Chemical Vapor Deposition from Ethylene Gas

Japanese Journal of Applied Physics ◽

10.1143/jjap.34.l1218 ◽

1995 ◽

Vol 34 (Part 2, No. 9B) ◽

pp. L1218-L1220 ◽

Cited By ~ 33

Author(s):

Jun-ichi Suzuki ◽

Shigenobu Okada

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Diamondlike Carbon ◽

Resonance Plasma

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Effect of hydrogen flow on the properties of hydrogenated amorphous carbon films fabricated by electron cyclotron resonance plasma enhanced chemical vapor deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2011.03.107 ◽

2011 ◽

Vol 206 (5) ◽

pp. 1007-1010 ◽

Cited By ~ 15

Author(s):

X.R. Deng ◽

Y.X. Leng ◽

X. Dong ◽

H. Sun ◽

Nan Huang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Amorphous Carbon Films ◽

Hydrogen Flow ◽

Hydrogenated Amorphous ◽

Resonance Plasma

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Effect of deposition pressure on bonding nature in hydrogenated amorphous carbon films processed by electron cyclotron resonance plasma enhanced chemical vapor deposition

Materials Science and Engineering A ◽

10.1016/s0921-5093(99)00566-3 ◽

2000 ◽

Vol 277 (1-2) ◽

pp. 57-63 ◽

Cited By ~ 12

Author(s):

Ho J. Ryu ◽

Sung H. Kim ◽

Soon H. Hong

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Deposition Pressure ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous ◽

Resonance Plasma

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Preparation of nitrogen containing carbon films using chemical vapor deposition enhanced by electron cyclotron resonance plasma

Applied Physics Letters ◽

10.1063/1.115442 ◽

1995 ◽

Vol 67 (3) ◽

pp. 353-355 ◽

Cited By ~ 31

Author(s):

Tohru Inoue ◽

Shigeo Ohshio ◽

Hidetoshi Saitoh ◽

Kiichiro Kamata

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Effects of process parameters on the structure of hydrogenated amorphous carbon films processed by electron cyclotron resonance plasma enhanced chemical vapor deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2010.02.012 ◽

2010 ◽

Vol 204 (18-19) ◽

pp. 3029-3033 ◽

Cited By ~ 4

Author(s):

Dong Xie ◽

Hengjun Liu ◽

Xingrui Deng ◽

Y.X. Leng ◽

Nan Huang

Keyword(s):

Chemical Vapor Deposition ◽

Process Parameters ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous ◽

Resonance Plasma

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Diamondlike carbon films synthesized by electron cyclotron resonance chemical vapor deposition

10.1117/12.277064 ◽

1997 ◽

Author(s):

Mark B. Moran ◽

Linda F. Johnson

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamondlike Carbon

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Nitrogenated amorphous carbon films synthesized by electron cyclotron resonance plasma enhanced chemical vapor deposition

Diamond and Related Materials ◽

10.1016/s0925-9635(99)00017-5 ◽

1999 ◽

Vol 8 (8-9) ◽

pp. 1732-1736 ◽

Cited By ~ 10

Author(s):

W.-C. Chan ◽

M.-K. Fung ◽

I. Bello ◽

C.-S. Lee ◽

S.-T. Lee

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Carbon ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Amorphous Carbon Films ◽

Resonance Plasma

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Preparation of diamondlike carbon films by electron cyclotron resonance chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.345428 ◽

1990 ◽

Vol 67 (6) ◽

pp. 2890-2893 ◽

Cited By ~ 50

Author(s):

I. Nagai ◽

A. Ishitani ◽

H. Kuroda ◽

M. Yoshikawa ◽

N. Nagai

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamondlike Carbon

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Effect of nitrogen flow on the properties of carbon nitride films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Vacuum ◽

10.1016/j.vacuum.2021.110223 ◽

2021 ◽

pp. 110223

Author(s):

Sixu Lin ◽

Dong Xie ◽

Yongliang Tang ◽

Yiwen Wang ◽

Fengjuan Jing ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Carbon Nitride ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Nitrogen Flow ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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