Preparation of diamondlike carbon films by electron cyclotron resonance chemical vapor deposition

I. Nagai; A. Ishitani; H. Kuroda; M. Yoshikawa; N. Nagai

doi:10.1063/1.345428

Preparation of diamondlike carbon films by electron cyclotron resonance chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.345428 ◽

1990 ◽

Vol 67 (6) ◽

pp. 2890-2893 ◽

Cited By ~ 50

Author(s):

I. Nagai ◽

A. Ishitani ◽

H. Kuroda ◽

M. Yoshikawa ◽

N. Nagai

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamondlike Carbon

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Characterization of diamondlike carbon films grown by super‐wide electron‐cyclotron resonance plasma assisted chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579286 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1068-1071 ◽

Cited By ~ 4

Author(s):

A. Ishii ◽

S. Amadatsu ◽

S. Minomo ◽

M. Taniguchi ◽

M. Sugiyo ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamondlike Carbon ◽

Resonance Plasma

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Diamondlike carbon films synthesized by electron cyclotron resonance chemical vapor deposition

10.1117/12.277064 ◽

1997 ◽

Author(s):

Mark B. Moran ◽

Linda F. Johnson

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamondlike Carbon

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Effect of microwave power on diamond-like carbon films deposited using electron cyclotron resonance chemical vapor deposition

Diamond and Related Materials ◽

10.1016/s0925-9635(00)00360-5 ◽

2000 ◽

Vol 9 (12) ◽

pp. 2024-2030 ◽

Cited By ~ 24

Author(s):

S.F. Yoon ◽

K.H. Tan ◽

J. Rusli ◽

Ahn ◽

Q.F. Huang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Power ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon

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Deposition of diamond-like carbon films using the screen grid method in electron cyclotron resonance chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581560 ◽

1999 ◽

Vol 17 (1) ◽

pp. 121-124 ◽

Cited By ~ 9

Author(s):

S. F. Yoon ◽

Rusli ◽

J. Ahn ◽

Q. Zhang ◽

Y. S. Wu ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Grid Method ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Screen Grid

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Preparation of nitrogen containing carbon films using chemical vapor deposition enhanced by electron cyclotron resonance plasma

Applied Physics Letters ◽

10.1063/1.115442 ◽

1995 ◽

Vol 67 (3) ◽

pp. 353-355 ◽

Cited By ~ 31

Author(s):

Tohru Inoue ◽

Shigeo Ohshio ◽

Hidetoshi Saitoh ◽

Kiichiro Kamata

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Dielectric properties of molybdenum-containing diamond-like carbon films deposited using electron cyclotron resonance chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(02)00049-4 ◽

2002 ◽

Vol 409 (2) ◽

pp. 211-219 ◽

Cited By ~ 9

Author(s):

Q.F. Huang ◽

S.F. Yoon ◽

Rusli ◽

Q. Zhang ◽

J. Ahn

Keyword(s):

Chemical Vapor Deposition ◽

Dielectric Properties ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon

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Molybdenum-containing carbon films deposited using the screen grid technique in an electron cyclotron resonance chemical vapor deposition system

Diamond and Related Materials ◽

10.1016/s0925-9635(99)00221-6 ◽

2000 ◽

Vol 9 (3-6) ◽

pp. 534-538 ◽

Cited By ~ 21

Author(s):

Q.F Huang ◽

S.F Yoon ◽

Rusli ◽

H Yang ◽

J Ahn ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Grid Technique ◽

Screen Grid

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Hydrogenated amorphous carbon films deposited in an electron cyclotron resonance–chemical vapor deposition discharge reactor using acetylene

Diamond and Related Materials ◽

10.1016/s0925-9635(99)00252-6 ◽

2000 ◽

Vol 9 (3-6) ◽

pp. 654-657 ◽

Cited By ~ 5

Author(s):

B.K. Kim ◽

T.A. Grotjohn

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Carbon ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous

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Study of fluorinated amorphous carbon films prepared by electron cyclotron resonance chemical vapor deposition

Acta Physica Sinica ◽

10.7498/aps.55.2572 ◽

2006 ◽

Vol 55 (5) ◽

pp. 2572

Author(s):

Wu Zhen-Yu ◽

Yang Yin-Tang ◽

Wang Jia-You

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Carbon ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Amorphous Carbon Films

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Deposition of Diamondlike Carbon Films Using Electron Cyclotron Resonance Plasma Chemical Vapor Deposition from Ethylene Gas

Japanese Journal of Applied Physics ◽

10.1143/jjap.34.l1218 ◽

1995 ◽

Vol 34 (Part 2, No. 9B) ◽

pp. L1218-L1220 ◽

Cited By ~ 33

Author(s):

Jun-ichi Suzuki ◽

Shigenobu Okada

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Diamondlike Carbon ◽

Resonance Plasma

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