Physical characterization of hafnium oxide thin films and their application as gas sensing devices

1998 ◽  
Vol 16 (6) ◽  
pp. 3564-3568 ◽  
Author(s):  
S. Capone ◽  
G. Leo ◽  
R. Rella ◽  
P. Siciliano ◽  
L. Vasanelli ◽  
...  
Keyword(s):  
Thin Films ◽  
Hafnium Oxide ◽  
Gas Sensing ◽  
Physical Characterization ◽  
Oxide Thin Films

scholarly journals Synthesis and Characterization of Copper Doped Zinc Oxide Thin Films for CO Gas Sensing

2018 ◽  
Vol 5 (10) ◽  
pp. 20904-20911
Author(s):  
Sachin S Bharadwaj ◽  
B.W. Shivaraj ◽  
H.N. Narasimha Murthy ◽  
M Krishna ◽  
Manjush Ganiger ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Gas Sensing ◽  
Synthesis And Characterization ◽  
Oxide Thin Films ◽  
Co Gas

Structural and electrical characterization of amorphous lanthanum hafnium oxide thin films

2006 ◽  
Vol 99 (10) ◽  
pp. 103704 ◽  
Author(s):  
Yim Fun Loo ◽  
Stephen Taylor ◽  
Robert T. Murray ◽  
Anthony C. Jones ◽  
Paul R. Chalker
Keyword(s):  
Thin Films ◽  
Hafnium Oxide ◽  
Electrical Characterization ◽  
Oxide Thin Films

Synthesis and Characterization of La-Doped Hafnium Oxide Thin Films by Sol–Gel Method

2021 ◽  
Vol 222 (1) ◽  
pp. 102-115
Author(s):  
S. Tongpeng ◽  
K. Makbun ◽  
P. Janphuang ◽  
S. Wannapaiboon ◽  
R. Pattanakul ◽  
...  
Keyword(s):  
Thin Films ◽  
Hafnium Oxide ◽  
Sol Gel ◽  
Synthesis And Characterization ◽  
Oxide Thin Films ◽  
Gel Method ◽  
Sol Gel Method ◽  
La Doped

Characterization of Tungsten Oxide Thin Films Produced by Spark Ablation for NO2 Gas Sensing

2016 ◽  
Vol 8 (6) ◽  
pp. 3933-3939 ◽  
Author(s):  
Nishchay A. Isaac ◽  
Marco Valenti ◽  
Andreas Schmidt-Ott ◽  
George Biskos
Keyword(s):  
Thin Films ◽  
Tungsten Oxide ◽  
Gas Sensing ◽  
Oxide Thin Films ◽  
Tungsten Oxide Thin Films

Characterization of e-beam evaporated hafnium oxide thin films on post thermal annealing

2013 ◽  
Vol 283 ◽  
pp. 617-622 ◽  
Author(s):  
M. Ramzan ◽  
M.F. Wasiq ◽  
A.M. Rana ◽  
S. Ali ◽  
M.Y. Nadeem
Keyword(s):  
Thin Films ◽  
Thermal Annealing ◽  
Hafnium Oxide ◽  
Oxide Thin Films

Characterization of K+ and Na+-Sensitive Membrane Fabricated by CF4 Plasma Treatment on Hafnium Oxide Thin Films on ISFET

2011 ◽  
Vol 158 (4) ◽  
pp. J91 ◽  
Author(s):  
Tseng-Fu Lu ◽  
Chia-Ming Yang ◽  
Jer-Chyi Wang ◽  
Kuan-I Ho ◽  
Chi-Hung Chin ◽  
...  
Keyword(s):  
Thin Films ◽  
Plasma Treatment ◽  
Hafnium Oxide ◽  
Oxide Thin Films ◽  
Sensitive Membrane

Physical Characterization of Zinc Oxide Thin Films Grown by ALD

2019 ◽  
Vol 25 (4) ◽  
pp. 85-92 ◽  
Author(s):  
Kandabara Tapily ◽  
David Stegall ◽  
Diefeng Gu ◽  
Helmut Baumgart ◽  
Gon Namkoong ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Physical Characterization ◽  
Oxide Thin Films
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