Physical Characterization of Zinc Oxide Thin Films Grown by ALD
Keyword(s):
2006 ◽
Vol 19
(5)
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pp. 457-460
Keyword(s):
2012 ◽
Vol 121
(1)
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pp. 217-220
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1998 ◽
Vol 16
(6)
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pp. 3564-3568
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2008 ◽
Vol 202
(22-23)
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pp. 5467-5470
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Keyword(s):
2003 ◽
Vol 38
(2)
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pp. 269-277
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