Characterization of K+ and Na+-Sensitive Membrane Fabricated by CF4 Plasma Treatment on Hafnium Oxide Thin Films on ISFET

2011 ◽  
Vol 158 (4) ◽  
pp. J91 ◽  
Author(s):  
Tseng-Fu Lu ◽  
Chia-Ming Yang ◽  
Jer-Chyi Wang ◽  
Kuan-I Ho ◽  
Chi-Hung Chin ◽  
...  
Keyword(s):  
Thin Films ◽  
Plasma Treatment ◽  
Hafnium Oxide ◽  
Oxide Thin Films ◽  
Sensitive Membrane

Physical characterization of hafnium oxide thin films and their application as gas sensing devices

1998 ◽  
Vol 16 (6) ◽  
pp. 3564-3568 ◽  
Author(s):  
S. Capone ◽  
G. Leo ◽  
R. Rella ◽  
P. Siciliano ◽  
L. Vasanelli ◽  
...  
Keyword(s):  
Thin Films ◽  
Hafnium Oxide ◽  
Gas Sensing ◽  
Physical Characterization ◽  
Oxide Thin Films

Structural and electrical characterization of amorphous lanthanum hafnium oxide thin films

2006 ◽  
Vol 99 (10) ◽  
pp. 103704 ◽  
Author(s):  
Yim Fun Loo ◽  
Stephen Taylor ◽  
Robert T. Murray ◽  
Anthony C. Jones ◽  
Paul R. Chalker
Keyword(s):  
Thin Films ◽  
Hafnium Oxide ◽  
Electrical Characterization ◽  
Oxide Thin Films

Synthesis and Characterization of La-Doped Hafnium Oxide Thin Films by Sol–Gel Method

2021 ◽  
Vol 222 (1) ◽  
pp. 102-115
Author(s):  
S. Tongpeng ◽  
K. Makbun ◽  
P. Janphuang ◽  
S. Wannapaiboon ◽  
R. Pattanakul ◽  
...  
Keyword(s):  
Thin Films ◽  
Hafnium Oxide ◽  
Sol Gel ◽  
Synthesis And Characterization ◽  
Oxide Thin Films ◽  
Gel Method ◽  
Sol Gel Method ◽  
La Doped

Characterization of e-beam evaporated hafnium oxide thin films on post thermal annealing

2013 ◽  
Vol 283 ◽  
pp. 617-622 ◽  
Author(s):  
M. Ramzan ◽  
M.F. Wasiq ◽  
A.M. Rana ◽  
S. Ali ◽  
M.Y. Nadeem
Keyword(s):  
Thin Films ◽  
Thermal Annealing ◽  
Hafnium Oxide ◽  
Oxide Thin Films

Optical characterization of hafnium oxide thin films for heat mirrors

2015 ◽  
Vol 32 ◽  
pp. 22-30 ◽  
Author(s):  
M. Ramzan ◽  
A.M. Rana ◽  
E. Ahmed ◽  
M.F. Wasiq ◽  
A.S. Bhatti ◽  
...  
Keyword(s):  
Thin Films ◽  
Hafnium Oxide ◽  
Optical Characterization ◽  
Oxide Thin Films

Fabrication characterization of hafnium oxide thin films

2019 ◽  
Vol 17 ◽  
pp. 1555-1560
Author(s):  
Suparat Tongpeng ◽  
Kornwipha Makbun ◽  
Panadda Peanporm ◽  
Rattiyawan Sangkorn ◽  
Orapim Namsar ◽  
...  
Keyword(s):  
Thin Films ◽  
Hafnium Oxide ◽  
Oxide Thin Films
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