Generation of a velocity selected, pulsed source of hyperthermal (1–10 eV) neutral metal atoms for thin film growth studies

1997 ◽  
Vol 15 (5) ◽  
pp. 2709-2716 ◽  
Author(s):  
Matthew P. Knowles ◽  
Stephen R. Leone
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth ◽  
Metal Atoms ◽  
Growth Studies ◽  
Neutral Metal

Characterization of a methyl radical source for ultrahigh vacuum thin film growth studies

2006 ◽  
Vol 24 (4) ◽  
pp. 1044-1050
Author(s):  
J. S. Gold ◽  
J. M. Lannon ◽  
K. S. Ziemer ◽  
M. Guntu ◽  
V. L. Tolani ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Ultrahigh Vacuum ◽  
Thin Film Growth ◽  
Methyl Radical ◽  
Growth Studies

scholarly journals Thin film growth of heavy fermion chiral magnet YbNi3Al9

2021 ◽  
Vol 118 (10) ◽  
pp. 102402
Author(s):  
Hiroaki Shishido ◽  
Akira Okumura ◽  
Tatsuya Saimyoji ◽  
Shota Nakamura ◽  
Shigeo Ohara ◽  
...  
Keyword(s):  
Thin Film ◽  
Heavy Fermion ◽  
Film Growth ◽  
Thin Film Growth

Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films

2021 ◽  
Author(s):  
Kristina Ashurbekova ◽  
Karina Ashurbekova ◽  
Iva Saric ◽  
Evgeny Modin ◽  
Mladen Petravic ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Molecular Layer ◽  
Thin Film Growth ◽  
Cross Linking ◽  
Layer By Layer ◽  
Molecular Layer Deposition ◽  
Layer Deposition ◽  
Hybrid Thin Films ◽  
Enhanced Stability

We developed a thin film growth with a radical-initiated cross-linking of vinyl groups in a layer-by-layer manner via molecular layer deposition (MLD). The cross-linked film exhibited improved properties like 12% higher density and enhanced stability compared to the non-cross-linked film.

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