Effects of the axial external magnetic field on the reduction of the dielectric window damage due to capacitive coupling in the inductively coupled plasma

1997 ◽  
Vol 15 (3) ◽  
pp. 564-567 ◽  
Author(s):  
Jung-Hun Kim ◽  
Ho-Jun Lee ◽  
Youn-Taeg Kim ◽  
Ki-Woong Whang ◽  
Jung-Hoon Joo
Keyword(s):  
Magnetic Field ◽  
External Magnetic Field ◽  
Inductively Coupled Plasma ◽  
Capacitive Coupling ◽  
Inductively Coupled ◽  
Dielectric Window

scholarly journals Effects of axial magnetic field on discharge characteristics of inductively coupled plasma

AIP Advances ◽  
2020 ◽  
Vol 10 (5) ◽  
pp. 055209
Author(s):  
Shengwu Zhang ◽  
Yiwen Li ◽  
Wang Ma ◽  
Xiaolong Wei ◽  
Wenyuan Zhang
Keyword(s):  
Magnetic Field ◽  
Inductively Coupled Plasma ◽  
Axial Magnetic Field ◽  
Discharge Characteristics ◽  
Inductively Coupled

Capacitively and Inductively Coupled Plasma for MEMS Applications

Volume 3 ◽  
2004 ◽  
Author(s):  
Jaime H. Lozano-Parada ◽  
William B. J. Zimmerman
Keyword(s):  
Magnetic Field ◽  
Electromagnetic Fields ◽  
Inductively Coupled Plasma ◽  
Flow Direction ◽  
Axial Pressure ◽  
Inductively Coupled ◽  
Laser Lithography ◽  
First Case ◽  
Lorentz Forces ◽  
Electric And Magnetic Field

We consider the development of capacitively and inductively coupled microplasma reactors for detection, control and chemical transformation in microelectromechanical (mems) applications. Current progress in fabrication techniques, including hot embossing, soft and laser lithography is reviewed. Numerical simulations of the interaction of electromagnetic fields with plasma flows in which the plasma flow is at right angles with the electric and magnetic field are analyzed. Two cases in which the electromagnetic fields induce lorentz forces that control the flow are presented. In the first case, the lorentz forces act along the flow direction and produce and increase in the axial pressure that accelerates the flow (micropump configuration). In the second case, the lorentz forces act against the flow by causing a drop in the axial pressure that slows down the flow (microbrake configuration).

scholarly journals Effect of capacitive coupling in a miniature inductively coupled plasma source

2012 ◽  
Vol 112 (9) ◽  
pp. 093306 ◽  
Author(s):  
Yoshinori Takao ◽  
Koji Eriguchi ◽  
Kouichi Ono
Keyword(s):  
Inductively Coupled Plasma ◽  
Plasma Source ◽  
Capacitive Coupling ◽  
Inductively Coupled
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