Generation of an electron cyclotron resonance plasma using coaxial‐type open‐ended dielectric cavity with permanent magnets

1996 ◽  
Vol 14 (6) ◽  
pp. 3039-3042 ◽  
Author(s):  
Tadashi Kimura ◽  
Yasunao Okazaki
Keyword(s):  
Cyclotron Resonance ◽  
Permanent Magnets ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Dielectric Cavity ◽  
Resonance Plasma

scholarly journals Large-Area Electron Cyclotron Resonance Plasma Source with Permanent Magnets. (2). Etching Characteristics.

Shinku ◽  
1994 ◽  
Vol 37 (3) ◽  
pp. 316-318
Author(s):  
Takashi INOUE ◽  
Tadayoshi OGAWA ◽  
Wataru MIYAZAWA ◽  
Yukio OKAMOTO ◽  
Shoji DEN ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Permanent Magnets ◽  
Electron Cyclotron Resonance ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Large Area ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

scholarly journals Large-Area Electron Cyclotron Resonance Plasma Source with Permanent Magnets. (1). Plasma Characteristics.

Shinku ◽  
1994 ◽  
Vol 37 (3) ◽  
pp. 312-315
Author(s):  
Takashi INOUE ◽  
Tadayoshi OGAWA ◽  
Wataru MIYAZAWA ◽  
Yukio OKAMOTO ◽  
Shoji DEN ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Permanent Magnets ◽  
Electron Cyclotron Resonance ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Large Area ◽  
Electron Cyclotron Resonance Plasma ◽  
Plasma Characteristics ◽  
Resonance Plasma

Large-Area Electron Cyclotron Resonance Plasma Source with Permanent Magnets

1993 ◽  
Vol 32 (Part 2, No. 11A) ◽  
pp. L1635-L1637 ◽  
Author(s):  
Noriyoshi Shida ◽  
Takashi Inoue ◽  
Hideki Kokai ◽  
Yuichi Sakamoto ◽  
Wataru Miyazawa ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Permanent Magnets ◽  
Electron Cyclotron Resonance ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Large Area ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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