The radio frequency hollow cathode plasma jet arc for the film deposition

1996 ◽  
Vol 14 (6) ◽  
pp. 3033-3038 ◽  
Author(s):  
H. Baránková ◽  
L. Bárdoš ◽  
S. Berg
Keyword(s):  
Radio Frequency ◽  
Hollow Cathode ◽  
Plasma Jet ◽  
Film Deposition ◽  
Cathode Plasma

Self-Lubricating Composite Coating on Air Foil Bearing Shaft by Hollow Cathode Plasma Jet

2005 ◽  
Vol 486-487 ◽  
pp. 157-160
Author(s):  
Min Kyu Yang ◽  
Hyu Seung Yang ◽  
Jong Ku Park ◽  
Keun Ryu ◽  
Yong Bok Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Hollow Cathode ◽  
Composite Films ◽  
Plasma Jet ◽  
Solid Lubricants ◽  
The Self ◽  
Cathode Plasma ◽  
Alloy Matrix ◽  
Foil Bearing ◽  
Planar Magnetron

The self-lubricating composite films were deposited on Inconel 718 by Hollow Cathode Plasma Jet (HCPJ). These composite materials consist of chrome nickel alloy matrix and Ag, BaF2/CaF2 solid lubricants. The Cr2O3-NiCr-Ag composite thin film was crystallized and had the main peaks of Cr2O3 (012) and Ag (111). The deposition rate of 200 nm /min by HCPJ was much faster than the ordinary R.F planar magnetron sputtering. The surface roughness of coated shaft was 30 nm.

scholarly journals Black Silicon Layer Formation using Radio-Frequency Multi-Hollow Cathode Plasma System and Its Application in Solar Cell

2003 ◽  
Vol 4 (5) ◽  
pp. 10-14
Author(s):  
U. Gangopadhyay ◽  
Kyung-Hae Kim ◽  
S.K. Dhungel ◽  
D. Mangalaraj ◽  
J.H. Park ◽  
...  
Keyword(s):  
Solar Cell ◽  
Radio Frequency ◽  
Hollow Cathode ◽  
Silicon Layer ◽  
Black Silicon ◽  
Layer Formation ◽  
Cathode Plasma ◽  
Plasma System

70cm radio frequency hollow cathode plasma source for modification of foils and membranes

1997 ◽  
Vol 97 (1-3) ◽  
pp. 759-767 ◽  
Author(s):  
D. Korzec ◽  
M. Mildner ◽  
F. Hillemann ◽  
J. Engemann
Keyword(s):  
Radio Frequency ◽  
Hollow Cathode ◽  
Plasma Source ◽  
Cathode Plasma

Deposition of BaxSr1-xTiO3thin Films by Double RF Hollow Cathode Plasma Jet System

2008 ◽  
Vol 48 (5-7) ◽  
pp. 515-520 ◽  
Author(s):  
Z. Hubička ◽  
P. Virostko ◽  
M. Tichý ◽  
M. Čada ◽  
P. Adámek ◽  
...  
Keyword(s):  
Hollow Cathode ◽  
Plasma Jet ◽  
Cathode Plasma

Self-Lubricating Composite Coating on Air Foil Bearing Shaft by Hollow Cathode Plasma Jet

2005 ◽  
pp. 157-160
Author(s):  
Min Kyu Yang ◽  
Hyu Seung Yang ◽  
Jong Ku Park ◽  
Keun Ryu ◽  
Yong Bok Lee ◽  
...  
Keyword(s):  
Composite Coating ◽  
Hollow Cathode ◽  
Plasma Jet ◽  
Cathode Plasma ◽  
Foil Bearing

Spatial Distribution of Plasma Parameters in DC-Energized Hollow Cathode Plasma Jet

2010 ◽  
Vol 50 (9) ◽  
pp. 878-885 ◽  
Author(s):  
S. Leshkov ◽  
P. Kudrna ◽  
M. Chichina ◽  
J. Klusoň ◽  
I. Picková ◽  
...  
Keyword(s):  
Spatial Distribution ◽  
Hollow Cathode ◽  
Plasma Jet ◽  
Cathode Plasma ◽  
Plasma Parameters
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