Comparative Study of Total Power Density at a Substrate in Pulsed DC Magnetron and Hollow-Cathode Plasma Jet Sputtering Systems

2009 ◽  
Vol 6 (S1) ◽  
pp. S247-S252 ◽  
Author(s):  
Martin Čada ◽  
Petr Virostko ◽  
Štěpán Kment ◽  
Zdeněk Hubička
Keyword(s):  
Comparative Study ◽  
Power Density ◽  
Hollow Cathode ◽  
Plasma Jet ◽  
Total Power ◽  
Cathode Plasma ◽  
Pulsed Dc

scholarly journals Ion current to a substrate in the pulsed dc hollow cathode plasma jet deposition system

2010 ◽  
Vol 43 (12) ◽  
pp. 124019 ◽  
Author(s):  
P Virostko ◽  
Z Hubička ◽  
M Čada ◽  
M Tichý
Keyword(s):  
Hollow Cathode ◽  
Plasma Jet ◽  
Ion Current ◽  
Cathode Plasma ◽  
Pulsed Dc

Self-Lubricating Composite Coating on Air Foil Bearing Shaft by Hollow Cathode Plasma Jet

2005 ◽  
Vol 486-487 ◽  
pp. 157-160
Author(s):  
Min Kyu Yang ◽  
Hyu Seung Yang ◽  
Jong Ku Park ◽  
Keun Ryu ◽  
Yong Bok Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Hollow Cathode ◽  
Composite Films ◽  
Plasma Jet ◽  
Solid Lubricants ◽  
The Self ◽  
Cathode Plasma ◽  
Alloy Matrix ◽  
Foil Bearing ◽  
Planar Magnetron

The self-lubricating composite films were deposited on Inconel 718 by Hollow Cathode Plasma Jet (HCPJ). These composite materials consist of chrome nickel alloy matrix and Ag, BaF2/CaF2 solid lubricants. The Cr2O3-NiCr-Ag composite thin film was crystallized and had the main peaks of Cr2O3 (012) and Ag (111). The deposition rate of 200 nm /min by HCPJ was much faster than the ordinary R.F planar magnetron sputtering. The surface roughness of coated shaft was 30 nm.

Deposition of BaxSr1-xTiO3thin Films by Double RF Hollow Cathode Plasma Jet System

2008 ◽  
Vol 48 (5-7) ◽  
pp. 515-520 ◽  
Author(s):  
Z. Hubička ◽  
P. Virostko ◽  
M. Tichý ◽  
M. Čada ◽  
P. Adámek ◽  
...  
Keyword(s):  
Hollow Cathode ◽  
Plasma Jet ◽  
Cathode Plasma

Self-Lubricating Composite Coating on Air Foil Bearing Shaft by Hollow Cathode Plasma Jet

2005 ◽  
pp. 157-160
Author(s):  
Min Kyu Yang ◽  
Hyu Seung Yang ◽  
Jong Ku Park ◽  
Keun Ryu ◽  
Yong Bok Lee ◽  
...  
Keyword(s):  
Composite Coating ◽  
Hollow Cathode ◽  
Plasma Jet ◽  
Cathode Plasma ◽  
Foil Bearing

Spatial Distribution of Plasma Parameters in DC-Energized Hollow Cathode Plasma Jet

2010 ◽  
Vol 50 (9) ◽  
pp. 878-885 ◽  
Author(s):  
S. Leshkov ◽  
P. Kudrna ◽  
M. Chichina ◽  
J. Klusoň ◽  
I. Picková ◽  
...  
Keyword(s):  
Spatial Distribution ◽  
Hollow Cathode ◽  
Plasma Jet ◽  
Cathode Plasma ◽  
Plasma Parameters

TiO2nanoparticle detection by means of laser beam scattering in a hollow cathode plasma jet

2016 ◽  
Vol 49 (26) ◽  
pp. 265201 ◽  
Author(s):  
R Perekrestov ◽  
P Kudrna ◽  
M Tichý ◽  
I Khalakhan ◽  
V F Myshkin
Keyword(s):  
Laser Beam ◽  
Hollow Cathode ◽  
Plasma Jet ◽  
Cathode Plasma ◽  
Beam Scattering

Titanium nitride deposited by high rate rf hollow cathode plasma jet reactive process

Vacuum ◽  
1995 ◽  
Vol 46 (12) ◽  
pp. 1433-1438 ◽  
Author(s):  
H Baránkova ◽  
L Bárdoš ◽  
S Berg
Keyword(s):  
Titanium Nitride ◽  
Hollow Cathode ◽  
Plasma Jet ◽  
High Rate ◽  
Cathode Plasma ◽  
Reactive Process
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