Particle trapping, transport, and charge in capacitively and inductively coupled argon plasmas in a Gaseous Electronics Conference Reference Cell

S. M. Collins; D. A. Brown; J. F. O’Hanlon; R. N. Carlile

doi:10.1116/1.580158

Particle trapping, transport, and charge in capacitively and inductively coupled argon plasmas in a Gaseous Electronics Conference Reference Cell

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580158 ◽

1996 ◽

Vol 14 (2) ◽

pp. 634-638 ◽

Cited By ~ 13

Author(s):

S. M. Collins ◽

D. A. Brown ◽

J. F. O’Hanlon ◽

R. N. Carlile

Keyword(s):

Particle Trapping ◽

Reference Cell ◽

Inductively Coupled ◽

Argon Plasmas ◽

Gaseous Electronics Conference

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Electron energy distribution function close to the mode transition region in an inductively coupled gaseous electronics conference reference cell

Applied Physics Letters ◽

10.1063/1.2362599 ◽

2006 ◽

Vol 89 (16) ◽

pp. 161501 ◽

Cited By ~ 24

Author(s):

S. V. Singh ◽

P. Kempkes ◽

H. Soltwisch

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Transition Region ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Mode Transition ◽

Reference Cell ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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Plasma Diagnostics in an Inductively Coupled Plasma - Gaseous Electronics Conference Reference Cell

ECS Transactions ◽

10.1149/1.2956051 ◽

2019 ◽

Vol 14 (1) ◽

pp. 365-373

Author(s):

Andre M. Daltrini ◽

Stanislav A. Moshkalev ◽

Thomas Morgan ◽

Robert Piejak ◽

William Graham

Keyword(s):

Plasma Diagnostics ◽

Inductively Coupled Plasma ◽

Reference Cell ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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Electrical characterization of an inductively coupled gaseous electronics conference reference cell

Journal of Applied Physics ◽

10.1063/1.3000667 ◽

2008 ◽

Vol 104 (8) ◽

pp. 083303 ◽

Cited By ~ 25

Author(s):

S. V. Singh ◽

C. Pargmann

Keyword(s):

Electrical Characterization ◽

Reference Cell ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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An Inductively-Coupled Plasma Source for the Gaseous Electronics Conference Rf Reference Cell

Journal of Research of the National Institute of Standards and Technology ◽

10.6028/jres.100.032 ◽

1995 ◽

Vol 100 (4) ◽

pp. 427 ◽

Cited By ~ 187

Author(s):

P.A. Miller ◽

G.A. Hebner ◽

K.E. Greenberg ◽

P.D. Pochan ◽

B.P. Aragon

Keyword(s):

Inductively Coupled Plasma ◽

Plasma Source ◽

Reference Cell ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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Characterization of Ion Energy Distribution in Inductively Coupled Argon Plasmas Sustained with Multiple Internal-Antenna Units

Japanese Journal of Applied Physics ◽

10.1143/jjap.47.6900 ◽

2008 ◽

Vol 47 (8) ◽

pp. 6900-6902 ◽

Cited By ~ 33

Author(s):

Kosuke Takenaka ◽

Yuichi Setsuhara ◽

Kazuaki Nishisaka ◽

Akinori Ebe

Keyword(s):

Energy Distribution ◽

Ion Energy ◽

Ion Energy Distribution ◽

Inductively Coupled ◽

Argon Plasmas ◽

Internal Antenna

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Introduction of analyte-loaded poly(dithiocarbamate) into inductively coupled argon plasmas by electrothermal vaporization. Spatial emission characteristics of the resulting dry plasmas

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/0584-8547(90)80069-u ◽

1990 ◽

Vol 45 (11) ◽

pp. 1265-1274 ◽

Cited By ~ 15

Author(s):

W.W. Van Berkel ◽

J. Balke ◽

F.J.M.J. Maessen

Keyword(s):

Emission Characteristics ◽

Electrothermal Vaporization ◽

Inductively Coupled ◽

Argon Plasmas

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In situ diode laser absorption measurements of plasma species in a gaseous electronics conference reference cell reactor

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.588212 ◽

1995 ◽

Vol 13 (3) ◽

pp. 954 ◽

Cited By ~ 9

Author(s):

Daniel B. Oh

Keyword(s):

Diode Laser ◽

Reference Cell ◽

Laser Absorption ◽

Plasma Species ◽

Cell Reactor ◽

Diode Laser Absorption ◽

Gaseous Electronics Conference ◽

Absorption Measurements

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Collisional-radiative model for non-Maxwellian inductively coupled argon plasmas using detailed fine-structure relativistic distorted-wave cross sections

The European Physical Journal D ◽

10.1140/epjd/e2013-40244-9 ◽

2013 ◽

Vol 67 (10) ◽

Cited By ~ 16

Author(s):

Dipti ◽

Reetesh Kumar Gangwar ◽

Rajesh Srivastava ◽

Allan Daniel Stauffer

Keyword(s):

Fine Structure ◽

Cross Sections ◽

Distorted Wave ◽

Inductively Coupled ◽

Argon Plasmas ◽

Collisional Radiative Model ◽

Radiative Model

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Spatial distributions of absolute densities of argon metastable state 3p54s in a Gaseous Electronics Conference Reference Cell

Journal of Applied Physics ◽

10.1063/1.371441 ◽

1999 ◽

Vol 86 (9) ◽

pp. 4767-4771 ◽

Cited By ~ 9

Author(s):

Edward Augustyniak ◽

Serguei Filimonov ◽

Jacek Borysow

Keyword(s):

Metastable State ◽

Spatial Distributions ◽

Reference Cell ◽

Gaseous Electronics Conference

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Current and Voltage Measurements in the Gaseous Electronics Conference Rf Reference Cell

Journal of Research of the National Institute of Standards and Technology ◽

10.6028/jres.100.026 ◽

1995 ◽

Vol 100 (4) ◽

pp. 341 ◽

Cited By ~ 20

Author(s):

M.A. Sobolewski

Keyword(s):

Reference Cell ◽

Gaseous Electronics Conference

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