Reactor modeling for radio frequency plasma deposition of SiNxHy: Comparison between two reactor designs

1996 ◽  
Vol 14 (4) ◽  
pp. 2071-2082 ◽  
Author(s):  
H. Caquineau ◽  
G. Dupont ◽  
B. Despax ◽  
J. P. Couderc
Keyword(s):  
Radio Frequency ◽  
Plasma Deposition ◽  
Radio Frequency Plasma ◽  
Reactor Modeling ◽  
Frequency Plasma

Synthesis and magnetic properties of Cu doped ZnO nanorods via radio frequency plasma deposition

2008 ◽  
Vol 93 (2) ◽  
pp. 023103 ◽  
Author(s):  
Z. F. Wu ◽  
X. M. Wu ◽  
L. J. Zhuge ◽  
X. M. Chen ◽  
X. F. Wang
Keyword(s):  
Magnetic Properties ◽  
Radio Frequency ◽  
Plasma Deposition ◽  
Zno Nanorods ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Doped Zno

Synthesis and magnetic properties of Mn-doped ZnO nanorods via radio frequency plasma deposition

2010 ◽  
Vol 64 (3) ◽  
pp. 472-474 ◽  
Author(s):  
Z.F. Wu ◽  
X.M. Wu ◽  
L.J. Zhuge ◽  
B. Hong ◽  
X.M. Yang ◽  
...  
Keyword(s):  
Magnetic Properties ◽  
Radio Frequency ◽  
Plasma Deposition ◽  
Zno Nanorods ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Doped Zno ◽  
Mn Doped

Dual‐mode microwave/radio frequency plasma deposition of dielectric thin films

1989 ◽  
Vol 54 (26) ◽  
pp. 2645-2647 ◽  
Author(s):  
L. Martinu ◽  
J. E. Klemberg‐Sapieha ◽  
M. R. Wertheimer
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Plasma Deposition ◽  
Radio Frequency Plasma ◽  
Dual Mode ◽  
Dielectric Thin Films ◽  
Frequency Plasma ◽  
Microwave Radio
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