Pulsed radio frequency plasma deposition of a-SiNx:H alloys: Film properties, growth mechanism, and applications

2006 ◽  
Vol 100 (6) ◽  
pp. 063308 ◽  
Author(s):  
R. Vernhes ◽  
O. Zabeida ◽  
J. E. Klemberg-Sapieha ◽  
L. Martinu
Keyword(s):  
Radio Frequency ◽  
Growth Mechanism ◽  
Plasma Deposition ◽  
Radio Frequency Plasma ◽  
Film Properties ◽  
Frequency Plasma

RF-MBE Growth of InN Dots on N-polar GaN Grown on Vicinal c-plane Sapphire

2004 ◽  
Vol 831 ◽  
Author(s):  
Naoki Hashimoto ◽  
Naohiro Kikukawa ◽  
Song-Bek Che ◽  
Yoshihiro Ishitani ◽  
Akihiko Yoshikawa
Keyword(s):  
Quantum Dots ◽  
Molecular Beam Epitaxy ◽  
Radio Frequency ◽  
Growth Mechanism ◽  
Molecular Beam ◽  
Lattice Relaxation ◽  
Radio Frequency Plasma ◽  
Mbe Growth ◽  
Frequency Plasma ◽  
Nominal Coverage

ABSTRACTWe have grown InN quantum dots (QDs) on nitrogen-polarity (N-polarity) GaN under-layer by the radio-frequency plasma-assisted molecular beam epitaxy (RF-MBE), and systematically investigated growth mechanism of the InN dots. The InN QDs with the N-polarity could be grown at about 500°C, which was much higher than that of previous reports on InN dots grown by MBE. When the nominal coverage of InN became more than 1 mono-layer (ML), lattice relaxation of InN occurred and high density InN dots were uniformly formed. These results indicated that InN dots were formed by Stranski-Krastanov (S-K) growth mode. For the InN deposition above about 8ML, InN dots tended to coalesce and resulted in remarakable decrease of the dots density.

Synthesis and magnetic properties of Cu doped ZnO nanorods via radio frequency plasma deposition

2008 ◽  
Vol 93 (2) ◽  
pp. 023103 ◽  
Author(s):  
Z. F. Wu ◽  
X. M. Wu ◽  
L. J. Zhuge ◽  
X. M. Chen ◽  
X. F. Wang
Keyword(s):  
Magnetic Properties ◽  
Radio Frequency ◽  
Plasma Deposition ◽  
Zno Nanorods ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Doped Zno

Synthesis and magnetic properties of Mn-doped ZnO nanorods via radio frequency plasma deposition

2010 ◽  
Vol 64 (3) ◽  
pp. 472-474 ◽  
Author(s):  
Z.F. Wu ◽  
X.M. Wu ◽  
L.J. Zhuge ◽  
B. Hong ◽  
X.M. Yang ◽  
...  
Keyword(s):  
Magnetic Properties ◽  
Radio Frequency ◽  
Plasma Deposition ◽  
Zno Nanorods ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Doped Zno ◽  
Mn Doped
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