Neon ion beam‐induced surface reactions of SF6 adsorbed molecules with silicon at low temperature

1996 ◽  
Vol 14 (1) ◽  
pp. 234-239 ◽  
Author(s):  
J. Royer ◽  
P. Y. Tessier ◽  
B. Grolleau ◽  
G. Turban
1987 ◽  
Vol 94 ◽  
Author(s):  
S. B. Ogale ◽  
M. Thomsen ◽  
A. Madhukar

ABSTRACTComputer simulations of III-V molecular beam epitaxy (MBE) show that surface reconstruction induced modulation of kinetic rates could give rise to ordering in alloys. Results are also presented for the possible influence of an external ion beam in achieving low temperature epitaxy as well as smoother growth front under usual conditions.


1997 ◽  
Vol 101 (40) ◽  
pp. 7908-7918 ◽  
Author(s):  
P. W. Kash ◽  
M. X. Yang ◽  
A. V. Teplyakov ◽  
G. W. Flynn ◽  
B. E. Bent

Author(s):  
Shane A. Cybart ◽  
Rantej Bali ◽  
Gregor Hlawacek ◽  
Falk Röder ◽  
Jürgen Fassbender

1986 ◽  
Vol 74 ◽  
Author(s):  
B. R. Appleton ◽  
R. A. Zuhr ◽  
T. S. Noggle ◽  
N. Herbots ◽  
S. J. Pennycook

AbstractThe technique of ion beam deposition (IBD) is utilized to investigate low-energy, ion-induced damage on Si and Ge; to study reactive ion cleaning of Si and Ge; to fabricate amorphous isotopic heterostructures; and to fabricate and study the low-temperature epitaxial deposition of 74Ge on Ge(100), 30Si on Si(100), and 74Ge on Si(100). The techniques of ion scattering/channeling and cross-sectional TEM are combined to characterize the deposits.


1993 ◽  
Vol 316 ◽  
Author(s):  
Tsutomu Iida ◽  
Yunosuke Makita ◽  
Stefan Winter ◽  
Shinji Kimura ◽  
Yushin Tsai ◽  
...  

ABSTRACTC-doped GaAs films were prepared by novely a developed, combined ion beam and molecular beam method (CIBMBE) as a function of hyperthermal (30–500 eV) energies (EC+) of carbon ion (C+) beam. Ion beams of a fixed beam current density were impinged during molecular beam epitaxy growth of GaAs at substrate temperature of 550 °C. Low temperature (2 K) photoluminescence (PL) has been used to characterize the samples together with Hall effects measurements at room temperature. Through the spectral evolution of an emission denoted by [g-g]β which is a specific emission relevant to acceptor-acceptor pairs, the activation rate was confirmed to increase with increasing EC+ for EC+ lower than 170 eV. It was explicitly demonstrated that the most effective Ec+ to establish highest activation rate is located at ~170 eV. This growing activation rate was suggested to be attributed to the enhanced migration of both impinged C and host constituent atoms with increasing EC+. This surmise was supported also by Hall effect measurements which revealed the maximum net hole concentration ( |NA-ND| ) for EC+=170 eV. For EC+ higher than ~170 eV, increasing EC+ was found to induce the reduction of activation rate. It was suggested that this observation is ascribed not to the formation of C donors but to the enhanced sputtering effect of impinged C+ ions with increasing EC+.


1976 ◽  
Vol 65 (1) ◽  
pp. 191 ◽  
Author(s):  
M. R. Raju ◽  
E. Blakely ◽  
J. Howard ◽  
J. T. Lyman ◽  
D. P. Kalofonos ◽  
...  

1982 ◽  
Vol 47 (3) ◽  
pp. 227-232 ◽  
Author(s):  
U. G�rlach ◽  
M. Hitzfeld ◽  
P. Ziemann ◽  
W. Buckel

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