Quantitative analysis of borophosphosilicate glass films on silicon using infrared external reflection–absorption spectroscopy

James E. Franke; Lizhong Zhang; Thomas M. Niemczyk; David M. Haaland; Kenneth J. Radigan

doi:10.1116/1.579636

Quantitative analysis of borophosphosilicate glass films on silicon using infrared external reflection–absorption spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579636 ◽

1995 ◽

Vol 13 (4) ◽

pp. 1959-1966 ◽

Cited By ~ 9

Author(s):

James E. Franke ◽

Lizhong Zhang ◽

Thomas M. Niemczyk ◽

David M. Haaland ◽

Kenneth J. Radigan

Keyword(s):

Quantitative Analysis ◽

Absorption Spectroscopy ◽

Borophosphosilicate Glass ◽

Glass Films

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Quantitative Analysis of the Photodegradation of Emitting CdTe Nanocrystals Dispersed in Glass Films

The Journal of Physical Chemistry B ◽

10.1021/jp052524x ◽

2005 ◽

Vol 109 (38) ◽

pp. 17855-17860 ◽

Cited By ~ 16

Author(s):

N. Murase ◽

P. Yang ◽

C. L. Li

Keyword(s):

Quantitative Analysis ◽

Cdte Nanocrystals ◽

Glass Films

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Quantitative analysis of immobilized metalloenzymes by atomic absorption spectroscopy

Analytical and Bioanalytical Chemistry ◽

10.1007/s00216-004-2875-8 ◽

2004 ◽

Vol 380 (7-8) ◽

pp. 937-941 ◽

Cited By ~ 6

Author(s):

Klaus Opwis ◽

Dierk Knittel ◽

Eckhard Schollmeyer

Keyword(s):

Quantitative Analysis ◽

Atomic Absorption ◽

Absorption Spectroscopy ◽

Atomic Absorption Spectroscopy

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Effect of excess lithium in LiMn2O4 and Li1.15Mn1.85O4 electrodes revealed by quantitative analysis of soft X-ray absorption spectroscopy

Applied Physics Letters ◽

10.1063/1.4977502 ◽

2017 ◽

Vol 110 (9) ◽

pp. 093902 ◽

Cited By ~ 10

Author(s):

Zengqing Zhuo ◽

Paul. Olalde-Velasco ◽

Timothy Chin ◽

Vincent Battaglia ◽

Stephen J. Harris ◽

...

Keyword(s):

Quantitative Analysis ◽

Absorption Spectroscopy ◽

X Ray ◽

X Ray Absorption

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Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition of Borophosphosilicate Glass Films

Japanese Journal of Applied Physics ◽

10.1143/jjap.47.1735 ◽

2008 ◽

Vol 47 (3) ◽

pp. 1735-1739 ◽

Cited By ~ 4

Author(s):

Minghui Yin ◽

Lingli Zhao ◽

Xiangyu Xu ◽

Shouguo Wang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Chemical Vapor ◽

Pressure Plasma ◽

Borophosphosilicate Glass ◽

Glass Films

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Effect of densification temperature on the fourier transform infrared analysis of borophosphosilicate glass films

Thin Solid Films ◽

10.1016/0040-6090(88)90177-0 ◽

1988 ◽

Vol 164 ◽

pp. 461-466 ◽

Cited By ~ 4

Author(s):

Bhola N. Mehrotra

Keyword(s):

Fourier Transform ◽

Fourier Transform Infrared ◽

Infrared Analysis ◽

Densification Temperature ◽

The Fourier Transform ◽

Borophosphosilicate Glass ◽

Glass Films

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Properties of borophosphosilicate glass films deposited by different chemical vapor deposition techniques

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586424 ◽

1992 ◽

Vol 10 (2) ◽

pp. 633 ◽

Cited By ~ 41

Author(s):

S. Rojas

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Borophosphosilicate Glass ◽

Deposition Techniques ◽

Glass Films

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Quantitative analysis of tungsten silicide film and borophosphosilicate glass film deposited on a silicon wafer using electron probe microanalysis.

BUNSEKI KAGAKU ◽

10.2116/bunsekikagaku.40.11_t195 ◽

1991 ◽

Vol 40 (11) ◽

pp. T195-T202 ◽

Cited By ~ 1

Author(s):

Noriko MAKIISHI ◽

Akira YAMAMOTO ◽

Teruo OKANO ◽

Yasuharu MATSUMURA

Keyword(s):

Quantitative Analysis ◽

Silicon Wafer ◽

Electron Probe Microanalysis ◽

Electron Probe ◽

Glass Film ◽

Tungsten Silicide ◽

Silicide Film ◽

Borophosphosilicate Glass

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Quantitative Analysis of Trace Moisture in N2and NH3Gases with Dual-Cell Near-Infrared Diode Laser Absorption Spectroscopy

Analytical Chemistry ◽

10.1021/ac980011z ◽

1998 ◽

Vol 70 (15) ◽

pp. 3315-3321 ◽

Cited By ~ 16

Author(s):

Shang-Qian Wu ◽

Jun-ichi Morishita ◽

Hiroshi Masusaki ◽

Tetsuya Kimishima

Keyword(s):

Quantitative Analysis ◽

Diode Laser ◽

Absorption Spectroscopy ◽

Near Infrared ◽

Laser Absorption Spectroscopy ◽

Laser Absorption ◽

Trace Moisture ◽

Diode Laser Absorption

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Determination of the composition and thickness of borophosphosilicate glass films by infrared ellipsometry

Applied Physics Letters ◽

10.1063/1.112081 ◽

1994 ◽

Vol 65 (10) ◽

pp. 1236-1238 ◽

Cited By ~ 2

Author(s):

R. Ossikovski ◽

N. Blayo ◽

B. Drévillon ◽

M. Firon ◽

B. Delahaye ◽

...

Keyword(s):

Infrared Ellipsometry ◽

Borophosphosilicate Glass ◽

Glass Films

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Rapid Thermal Annealing of Spin-On Glass Films

MRS Proceedings ◽

10.1557/proc-284-197 ◽

1992 ◽

Vol 284 ◽

Cited By ~ 3

Author(s):

Laurent Ventura ◽

Bouchaíb Hartiti ◽

Abdelilah Slaoui ◽

Jean-Claude Muller ◽

Paul Siffert

Keyword(s):

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Absorption Spectroscopy ◽

Infrared Absorption ◽

Electrical Measurement ◽

Infrared Absorption Spectroscopy ◽

Insulating Films ◽

State Densities ◽

Interfacial State ◽

Glass Films

ABSTRACTRapid thermal annealing is investigated for curing spin-on glass insulating films. The annealed SOG films were mainly evaluated using infrared absorption spectroscopy and by electrical measurement of the defects present at the Si/Sio2 interface. We found in particular after rapid thermal annealing an important densification of the layers as a function of temperature and a reduction of the interfacial state densities which are comparable to classical thermal oxides.

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