Monte Carlo simulation of ion transport through radio frequency collisional sheaths
1994 ◽
Vol 12
(6)
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pp. 3242-3244
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2009 ◽
1997 ◽
Vol 126
(1-4)
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pp. 290-293
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Keyword(s):
1999 ◽
Vol 27
(5)
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pp. 1399-1405
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1999 ◽
Vol 68
(4)
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pp. 1208-1215
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Keyword(s):
2010 ◽
Vol 4
(12)
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pp. 2069
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Keyword(s):
2012 ◽
Vol 7
(33)
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Keyword(s):
2001 ◽
Vol 19
(3)
◽
pp. 838-847
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Keyword(s):