Particle-in-cell/Monte Carlo simulation of radio frequency SiH/sub 4//H/sub 2/ discharges

M. Yan; W.J. Goedheer

doi:10.1109/27.799818

Particle-in-cell/Monte Carlo simulation of radio frequency SiH/sub 4//H/sub 2/ discharges

IEEE Transactions on Plasma Science ◽

10.1109/27.799818 ◽

1999 ◽

Vol 27 (5) ◽

pp. 1399-1405 ◽

Cited By ~ 14

Author(s):

M. Yan ◽

W.J. Goedheer

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Radio Frequency ◽

Particle In Cell

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Particle-in-cell Monte Carlo simulation using free path method for radio frequency argon discharge modelling: Comparison with experiment

International Journal of the Physical Sciences ◽

10.5897/ijps10.028 ◽

2012 ◽

Vol 7 (33) ◽

Cited By ~ 1

Author(s):

Djilali Benyoucef

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Radio Frequency ◽

Free Path ◽

Particle In Cell ◽

Comparison With Experiment ◽

Argon Discharge

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On the energy conservation electrostatic particle-in-cell/Monte Carlo simulation: Benchmark and application to the radio frequency discharges

Chinese Physics B ◽

10.1088/1674-1056/23/3/035204 ◽

2014 ◽

Vol 23 (3) ◽

pp. 035204 ◽

Cited By ~ 4

Author(s):

Hong-Yu Wang ◽

Wei Jiang ◽

Peng Sun ◽

Ling-Bao Kong

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Energy Conservation ◽

Radio Frequency ◽

Particle In Cell ◽

Radio Frequency Discharges

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Axisymmetrical particle-in-cell/Monte Carlo simulation of narrow gap planar magnetron plasmas. II. Radio frequency-driven discharge

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1359535 ◽

2001 ◽

Vol 19 (3) ◽

pp. 838-847 ◽

Cited By ~ 12

Author(s):

Shuji Kondo ◽

Kenichi Nanbu

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Radio Frequency ◽

Narrow Gap ◽

Particle In Cell ◽

Planar Magnetron

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Particle-in-cell/Monte Carlo simulation of a capacitively coupled radio frequency Ar/CF4 discharge: Effect of gas composition

Journal of Applied Physics ◽

10.1063/1.1542920 ◽

2003 ◽

Vol 93 (5) ◽

pp. 2369-2379 ◽

Cited By ~ 56

Author(s):

V. Georgieva ◽

A. Bogaerts ◽

R. Gijbels

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Radio Frequency ◽

Gas Composition ◽

Capacitively Coupled ◽

Particle In Cell

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Particle-In-Cell/Monte-Carlo Simulation of Plasma and Neutral Gas Flow for the Inner Coating of PET Bottles by Plasma-Based Ion Implantation. N2 Gas Plasma

Plasma Processes and Polymers ◽

10.1002/ppap.200500008 ◽

2005 ◽

Vol 2 (6) ◽

pp. 480-484 ◽

Cited By ~ 5

Author(s):

Yoshiko Miyagawa ◽

Masaaki Tanaka ◽

Hiroshi Nakadate ◽

Masami Ikeyama ◽

Soji Miyagawa

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Ion Implantation ◽

Gas Flow ◽

Particle In Cell ◽

Pet Bottles ◽

Neutral Gas ◽

Gas Plasma

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Particle-in-cell/Monte Carlo simulation of electron and ion currents to cylindrical Langmuir probe

Contributions to Plasma Physics ◽

10.1002/ctpp.201800063 ◽

2018 ◽

Vol 59 (3) ◽

pp. 314-325 ◽

Cited By ~ 1

Author(s):

Petr Zikán ◽

Kristián Farkaš ◽

David Trunec ◽

Jaroslav Jánský ◽

Zdeněk Bonaventura

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Langmuir Probe ◽

Ion Currents ◽

Particle In Cell ◽

Cylindrical Langmuir Probe

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Study of scaling law for particle-in-cell/Monte Carlo simulation of low-temperature magnetized plasma for electric propulsion

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/ab394b ◽

2019 ◽

Vol 52 (45) ◽

pp. 455203 ◽

Cited By ~ 1

Author(s):

Jian Li ◽

Jianjun Wu ◽

Yu Zhang ◽

Sheng Tan ◽

Yang Ou

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Low Temperature ◽

Electric Propulsion ◽

Scaling Law ◽

Magnetized Plasma ◽

Particle In Cell

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A particle-in-cell Monte Carlo simulation of an rf discharge in methane: frequency and pressure features of the ion energy distribution function

Plasma Sources Science and Technology ◽

10.1088/0963-0252/15/3/015 ◽

2006 ◽

Vol 15 (3) ◽

pp. 402-409 ◽

Cited By ~ 10

Author(s):

O V Proshina ◽

T V Rakhimova ◽

A T Rakhimov

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Distribution Function ◽

Energy Distribution ◽

Energy Distribution Function ◽

Rf Discharge ◽

Ion Energy ◽

Ion Energy Distribution ◽

Particle In Cell

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Numerical Study of the Effects of Frequency in Inductively Coupled Plasma Using Particle-in-Cell/Monte Carlo Simulation

Japanese Journal of Applied Physics ◽

10.1143/jjap.39.1358 ◽

2000 ◽

Vol 39 (Part 1, No. 3A) ◽

pp. 1358-1364 ◽

Cited By ~ 3

Author(s):

Jin-Sung Oh ◽

Toshiaki Makabe

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Inductively Coupled Plasma ◽

Numerical Study ◽

Particle In Cell ◽

Inductively Coupled

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A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge

2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS) ◽

10.1109/plasma.2014.7012492 ◽

2014 ◽

Author(s):

Shuo Huang ◽

J. T. Gudmundsson

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Capacitively Coupled ◽

Particle In Cell

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