Silicon nitride/silicon oxynitride/silicon dioxide thin film multilayer characterized by variable angle spectroscopic ellipsometry

1992 ◽  
Vol 10 (4) ◽  
pp. 950-954 ◽  
Author(s):  
Yi‐Ming Xiong ◽  
Paul G. Snyder ◽  
John A. Woollam ◽  
Eric R. Krosche
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Silicon Dioxide ◽  
Spectroscopic Ellipsometry ◽  
Silicon Oxynitride ◽  
Variable Angle ◽  
Variable Angle Spectroscopic Ellipsometry

scholarly journals Thin‐film hermeticity: A quantitative analysis of diamondlike carbon using variable angle spectroscopic ellipsometry

1988 ◽  
Vol 64 (8) ◽  
pp. 4175-4180 ◽  
Author(s):  
S. Orzeszko ◽  
Bhola N. De ◽  
John A. Woollam ◽  
John J. Pouch ◽  
Samuel A. Alterovitz ◽  
...  
Keyword(s):  
Thin Film ◽  
Quantitative Analysis ◽  
Spectroscopic Ellipsometry ◽  
Variable Angle ◽  
Diamondlike Carbon ◽  
Variable Angle Spectroscopic Ellipsometry

Nanostructure of GdF 3 thin film evaluated by variable angle spectroscopic ellipsometry

2006 ◽  
Author(s):  
Jue Wang ◽  
Robert Maier ◽  
Paul G. Dewa ◽  
Horst Schreiber ◽  
Robert A. Bellman ◽  
...  
Keyword(s):  
Thin Film ◽  
Spectroscopic Ellipsometry ◽  
Variable Angle ◽  
Variable Angle Spectroscopic Ellipsometry

Controlled index of refraction silicon oxynitride films characterized by variable angle spectroscopic ellipsometry

1991 ◽  
Vol 206 (1-2) ◽  
pp. 248-253 ◽  
Author(s):  
Yi-Ming Xiong ◽  
Paul G. Snyder ◽  
John A. Woollam ◽  
G.A. Al-Jumaily ◽  
F.J. Gagliardi ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Silicon Oxynitride ◽  
Index Of Refraction ◽  
Variable Angle ◽  
Variable Angle Spectroscopic Ellipsometry

Nanoporous structure of a GdF_3 thin film evaluated by variable angle spectroscopic ellipsometry

2007 ◽  
Vol 46 (16) ◽  
pp. 3221 ◽  
Author(s):  
Jue Wang ◽  
Robert Maier ◽  
Paul G. Dewa ◽  
Horst Schreiber ◽  
Robert A. Bellman ◽  
...  
Keyword(s):  
Thin Film ◽  
Spectroscopic Ellipsometry ◽  
Nanoporous Structure ◽  
Variable Angle ◽  
Variable Angle Spectroscopic Ellipsometry

Optical Characterization of Silicon Oxynitride Thin Films by Variable Angle Spectroscopic Ellipsometry

1992 ◽  
Vol 18 (2) ◽  
pp. 124-128 ◽  
Author(s):  
Yi-Ming Xiong ◽  
Paul G. Snyder ◽  
John A. Woollam ◽  
G. A. Al-Jumaily ◽  
F. J. Gagliardi ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Optical Characterization ◽  
Silicon Oxynitride ◽  
Variable Angle ◽  
Variable Angle Spectroscopic Ellipsometry
Sign in / Sign up

Export Citation Format

Share Document