Mechanical properties of high deposition rate SiO2 films
1990 ◽
Vol 8
(3)
◽
pp. 1340-1343
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1993 ◽
Vol 11
(6)
◽
pp. 2945-2949
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Keyword(s):
1991 ◽
Vol 9
(4)
◽
pp. 2302-2308
◽
Keyword(s):
2013 ◽
Vol 591
◽
pp. 99-103
◽
2021 ◽
pp. 095440622199840
1996 ◽
Vol 35
(Part 1, No. 11)
◽
pp. 5625-5630
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1985 ◽
Vol 77-78
◽
pp. 941-944
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