Electrical and structural characteristics of thin epitaxial dielectric films formed by in situ rapid isothermal processing
1988 ◽
Vol 6
(3)
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pp. 1363-1366
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2018 ◽
Vol 33
(2)
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pp. 180-197
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2016 ◽
Vol 28
(1)
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pp. 337-343
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2021 ◽
2005 ◽
Vol 23
(5)
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pp. 2198
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2015 ◽
Vol 41
(10)
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pp. 13100-13104
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