The structures and interfaces of TiN films prepared by hollow cathode discharge ion plating technique

1987 ◽  
Vol 5 (2) ◽  
pp. 187-190 ◽  
Author(s):  
Li Pengxing ◽  
Zhang Meihua ◽  
Qi Xuan ◽  
Lin Xingfang ◽  
Yang Fan
Keyword(s):  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Tin Films ◽  
Ion Plating ◽  
Plating Technique

Uniformity of TiN Films Fabricated by Hollow Cathode Discharge

2010 ◽  
Vol 12 (2) ◽  
pp. 212-217 ◽  
Author(s):  
Jiang Haifu ◽  
Gong Chunzhi ◽  
Tian Xiubo ◽  
Yang Shiqin ◽  
R. K. Y Fu ◽  
...  
Keyword(s):  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Tin Films

scholarly journals Corrosion and Wear Resistance of Films of Ti/TiN Multilayers Deposited by Hollow Cathode Discharge Ion Plating.

Shinku ◽  
2000 ◽  
Vol 43 (4) ◽  
pp. 524-534 ◽  
Author(s):  
Itsuo ISHIGAMI ◽  
Ken'ichi MIURA ◽  
Hideaki HOSHINO ◽  
Tomoyuki MIZUKOSHI ◽  
Fumihiro URATANI ◽  
...  
Keyword(s):  
Wear Resistance ◽  
Hollow Cathode ◽  
Corrosion And Wear ◽  
Hollow Cathode Discharge ◽  
Ion Plating

Effects of bias on surface properties of TiN films fabricated by hollow cathode discharge

2007 ◽  
Vol 25 (4) ◽  
pp. 837-842 ◽  
Author(s):  
H. F. Jiang ◽  
X. B. Tian ◽  
S. Q. Yang ◽  
Ricky K. Y. Fu ◽  
Paul K. Chu
Keyword(s):  
Surface Properties ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Tin Films
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