Characteristics of hollow cathode discharge plasma and its application for the reactive ion plating of TiN and TiC

1993 ◽  
Vol 11 (4) ◽  
pp. 1496-1500 ◽  
Author(s):  
K. W. Whang ◽  
Y. W. Seo
Keyword(s):  
Hollow Cathode ◽  
Discharge Plasma ◽  
Hollow Cathode Discharge ◽  
Ion Plating

Optogalvanic effect sign change in a hollow cathode discharge plasma

Vacuum ◽  
2000 ◽  
Vol 58 (2-3) ◽  
pp. 272-279 ◽  
Author(s):  
M Janossy ◽  
S Gateva ◽  
Ch Andreeva ◽  
S Cartaleva
Keyword(s):  
Hollow Cathode ◽  
Discharge Plasma ◽  
Hollow Cathode Discharge ◽  
Optogalvanic Effect ◽  
Sign Change

DLC deposition inside tubes using hollow cathode discharge plasma immersion ion implantation and deposition

2010 ◽  
Vol 204 (18-19) ◽  
pp. 2909-2912 ◽  
Author(s):  
X.B. Tian ◽  
H.F. Jiang ◽  
C.Z. Gong ◽  
S.Q. Yang ◽  
R.K.Y. Fu ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Hollow Cathode ◽  
Discharge Plasma ◽  
Hollow Cathode Discharge ◽  
Plasma Immersion Ion Implantation

scholarly journals Corrosion and Wear Resistance of Films of Ti/TiN Multilayers Deposited by Hollow Cathode Discharge Ion Plating.

Shinku ◽  
2000 ◽  
Vol 43 (4) ◽  
pp. 524-534 ◽  
Author(s):  
Itsuo ISHIGAMI ◽  
Ken'ichi MIURA ◽  
Hideaki HOSHINO ◽  
Tomoyuki MIZUKOSHI ◽  
Fumihiro URATANI ◽  
...  
Keyword(s):  
Wear Resistance ◽  
Hollow Cathode ◽  
Corrosion And Wear ◽  
Hollow Cathode Discharge ◽  
Ion Plating

Influence of wall heating on CF2 radical in CF4 hollow cathode discharge plasma

2000 ◽  
Vol 50 (S3) ◽  
pp. 293-296
Author(s):  
Toshihiko Arai ◽  
Satoshi Aikyo ◽  
Miki Goto
Keyword(s):  
Hollow Cathode ◽  
Discharge Plasma ◽  
Hollow Cathode Discharge ◽  
Wall Heating

Investigation of SiOxCy film as the encapsulation layer for full transparent OLED using hollow cathode discharge plasma at room temperature

2010 ◽  
Vol 518 (22) ◽  
pp. 6195-6198 ◽  
Author(s):  
Kou-Chen Liu ◽  
Hsiang-Ling Cheng ◽  
Jung-Ruey Tsai ◽  
Yi-Lin Chiang ◽  
Yu-Chen Hsieh ◽  
...  
Keyword(s):  
Hollow Cathode ◽  
Room Temperature ◽  
Discharge Plasma ◽  
Hollow Cathode Discharge
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