Effects of bias on surface properties of TiN films fabricated by hollow cathode discharge

2007 ◽  
Vol 25 (4) ◽  
pp. 837-842 ◽  
Author(s):  
H. F. Jiang ◽  
X. B. Tian ◽  
S. Q. Yang ◽  
Ricky K. Y. Fu ◽  
Paul K. Chu
Keyword(s):  
Surface Properties ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Tin Films

Uniformity of TiN Films Fabricated by Hollow Cathode Discharge

2010 ◽  
Vol 12 (2) ◽  
pp. 212-217 ◽  
Author(s):  
Jiang Haifu ◽  
Gong Chunzhi ◽  
Tian Xiubo ◽  
Yang Shiqin ◽  
R. K. Y Fu ◽  
...  
Keyword(s):  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Tin Films

scholarly journals Hollow Cathode Discharge Coating Conditions and Properties of TiN Films with Straight-type W Cathode.

Shinku ◽  
1999 ◽  
Vol 42 (7) ◽  
pp. 676-679
Author(s):  
Yukio INOKUTI ◽  
Kazuhiro SUZUKI ◽  
Yasuhiro KOBAYASHI ◽  
Osamu OHKUBO
Keyword(s):  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Tin Films

Comparison of plasma characteristics of high-power pulsed sputtering glow discharge and hollow-cathode discharge

2020 ◽  
Vol 60 (1) ◽  
pp. 015501
Author(s):  
Shoki Abe ◽  
Katsuyuki Takahashi ◽  
Seiji Mukaigawa ◽  
Koichi Takaki ◽  
Ken Yukimura
Keyword(s):  
Glow Discharge ◽  
High Power ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Plasma Characteristics

Effect of aging the hollow cathode by sputtering on the analytical precision of the hollow cathode discharge emission source

1992 ◽  
Vol 64 (17) ◽  
pp. 1831-1835 ◽  
Author(s):  
Jih Lie. Tseng ◽  
Jau Yurn. Kung ◽  
J. C. Williams ◽  
Steven T. Griffin
Keyword(s):  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Emission Source ◽  
Analytical Precision

Comparison of trace analytical results obtained with different hollow cathode discharge lamps

1985 ◽  
Vol 85 (1-2) ◽  
pp. 15-22
Author(s):  
Zs. Vámos-Szilvássy ◽  
A. Buzási-Győrfi
Keyword(s):  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Analytical Results
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