Analysis of carbon and oxygen in GaAs using a secondary ion mass spectrometer equipped with a 20 K‐cryopanel pumping system

Yoshikazu Homma; Yoshikazu Ishii

doi:10.1116/1.573220

Analysis of carbon and oxygen in GaAs using a secondary ion mass spectrometer equipped with a 20 K‐cryopanel pumping system

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.573220 ◽

1985 ◽

Vol 3 (2) ◽

pp. 356-360 ◽

Cited By ~ 19

Author(s):

Yoshikazu Homma ◽

Yoshikazu Ishii

Keyword(s):

Mass Spectrometer ◽

Pumping System ◽

Secondary Ion

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Surface chemical analysis. Secondary-ion mass spectrometry. Calibration of the mass scale for a time-of-flight secondary-ion mass spectrometer

10.3403/30199194 ◽

2011 ◽

Keyword(s):

Mass Spectrometry ◽

Chemical Analysis ◽

Mass Spectrometer ◽

Secondary Ion Mass Spectrometry ◽

Time Of Flight ◽

Mass Scale ◽

Surface Chemical ◽

Ion Mass Spectrometry ◽

Secondary Ion ◽

Surface Chemical Analysis

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Secondary ion beam profile calculations in a 252Cf plasma desorption time-of-flight mass spectrometer

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(88)90460-0 ◽

1988 ◽

Vol 31 (4) ◽

pp. 588-591 ◽

Cited By ~ 5

Author(s):

F. Riggi

Keyword(s):

Mass Spectrometer ◽

Ion Beam ◽

Time Of Flight ◽

Beam Profile ◽

Flight Mass Spectrometer ◽

Plasma Desorption ◽

Desorption Time ◽

Secondary Ion

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Development of U–Pb dating of uraninite using a secondary ion mass spectrometer: Selection of reference material and establishment of calibration method

Island Arc ◽

10.1111/iar.12319 ◽

2019 ◽

Vol 28 (5) ◽

Cited By ~ 1

Author(s):

Kenji Horie ◽

Hiroshi Hidaka

Keyword(s):

Reference Material ◽

Mass Spectrometer ◽

Calibration Method ◽

Secondary Ion ◽

Selection Of

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Analyses of materials with a new high current secondary ion mass spectrometer

Vacuum ◽

10.1016/0042-207x(75)91235-x ◽

1975 ◽

Vol 25 (1) ◽

pp. 44

Keyword(s):

Mass Spectrometer ◽

High Current ◽

Secondary Ion

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Relative sensitivity factors and useful yields for a microfocused gallium ion beam and time‐of‐flight secondary ion mass spectrometer

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577631 ◽

1991 ◽

Vol 9 (3) ◽

pp. 1379-1384 ◽

Cited By ~ 4

Author(s):

J. Bennett ◽

D. Simons

Keyword(s):

Mass Spectrometer ◽

Ion Beam ◽

Time Of Flight ◽

Relative Sensitivity ◽

Sensitivity Factors ◽

Secondary Ion

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Calibration Point for Liquid Secondary Ion MassSpectrometry Tandem Mass Spectra Measuredwith an EBqQ Hybrid Mass Spectrometer

Journal of Mass Spectrometry ◽

10.1002/(sici)1096-9888(199603)31:3<280::aid-jms296>3.0.co;2-y ◽

1996 ◽

Vol 31 (3) ◽

pp. 280-288 ◽

Cited By ~ 6

Author(s):

Sharon W. Lemire ◽

Kenneth L. Busch

Keyword(s):

Mass Spectrometer ◽

Mass Spectra ◽

Tandem Mass ◽

Calibration Point ◽

Tandem Mass Spectra ◽

Hybrid Mass Spectrometer ◽

Secondary Ion

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A new thermal emission cesium primary ion source for secondary ion mass spectrometer

Review of Scientific Instruments ◽

10.1063/1.1142947 ◽

1992 ◽

Vol 63 (4) ◽

pp. 2414-2416 ◽

Cited By ~ 2

Author(s):

J. M. Zinkiewicz ◽

M. Sowa ◽

R. Baranowski ◽

L. Glusiec ◽

K. Kiszczak

Keyword(s):

Mass Spectrometer ◽

Thermal Emission ◽

Ion Source ◽

Secondary Ion

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Quantitative Analysis of Semiconductor Materials with Secondary Ion Mass Spectrometer

Japanese Journal of Applied Physics ◽

10.7567/jjaps.19s1.501 ◽

1980 ◽

Vol 19 (S1) ◽

pp. 501

Author(s):

Masaharu Oshima ◽

Izumi Kawashima ◽

Shizuka Yoshii

Keyword(s):

Quantitative Analysis ◽

Mass Spectrometer ◽

Semiconductor Materials ◽

Secondary Ion

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Improved understanding of an electron beam charge compensation method for magnetic sector secondary ion mass spectrometer analysis of insulators

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2746044 ◽

2007 ◽

Vol 25 (4) ◽

pp. 769-774 ◽

Cited By ~ 6

Author(s):

Z. Zhu ◽

C. Gu ◽

F. A. Stevie ◽

D. P. Griffis

Keyword(s):

Electron Beam ◽

Mass Spectrometer ◽

Charge Compensation ◽

Compensation Method ◽

Magnetic Sector ◽

Secondary Ion

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Modeling Transport of Secondary Ion Fragments into a Mass Spectrometer

Physics Procedia ◽

10.1016/j.phpro.2015.05.044 ◽

2015 ◽

Vol 66 ◽

pp. 352-360 ◽

Cited By ~ 1

Author(s):

J. Warmenhoven ◽

J. Demarche ◽

V. Palitsin ◽

K.J. Kirkby ◽

R.P. Webb

Keyword(s):

Mass Spectrometer ◽

Modeling Transport ◽

Secondary Ion

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