Summary Abstract: Ion beam deposition of hydrogenated amorphous silicon films

1982 ◽  
Vol 20 (3) ◽  
pp. 305-306 ◽  
Author(s):  
A. Kasdan ◽  
D. P. Goshorn ◽  
W. A. Lanford
Keyword(s):  
Amorphous Silicon ◽  
Ion Beam ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Ion Beam Deposition ◽  
Hydrogenated Amorphous ◽  
Beam Deposition

Preparation of hydrogenated amorphous silicon films by ion beam sputtering

1981 ◽  
Vol 80 (1-3) ◽  
pp. 169-176 ◽  
Author(s):  
Junji Saraie ◽  
Michiya Kobayashi ◽  
Yoshishisa Fujii ◽  
Hiroyuki Matsunami
Keyword(s):  
Amorphous Silicon ◽  
Ion Beam ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Hydrogenated Amorphous
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