End‐point determination of aluminum reactive ion etching by discharge impedance monitoring
1979 ◽
Vol 16
(2)
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pp. 385-387
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2003 ◽
Vol 65
(1-2)
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pp. 25-46
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2001 ◽
Vol 40
(Part 1, No. 3A)
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pp. 1457-1462
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2018 ◽
Vol 172
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pp. 159-166
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1983 ◽
Vol 1
(2)
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pp. 501
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