scholarly journals Use of TRIDYN and medium energy ion scattering to calibrate an industrial arsenic plasma doping process

2019 ◽  
Vol 37 (3) ◽  
pp. 031206 ◽  
Author(s):  
Jonathan England ◽  
Jaap Van den Berg ◽  
Andrew Rossall
Keyword(s):  
Medium Energy ◽  
Ion Scattering ◽  
Plasma Doping ◽  
Medium Energy Ion Scattering

Structure Determination of the Nisi2(111) Surface Using Medium Energy Ion Scattering with Monolayer Resolution

1990 ◽  
Vol 202 ◽  
Author(s):  
J. Vrijmoeth ◽  
P.M. Zagwijn ◽  
J.W.M. Frenken ◽  
J.F. van der Veen
Keyword(s):  
Surface Structure ◽  
Structure Determination ◽  
New Method ◽  
Medium Energy ◽  
Ion Scattering ◽  
Triple Layer ◽  
Medium Energy Ion Scattering

ABSTRACTThe surface structure of epitaxial NiSi2 films grown on Si (111) has been determined using a new method. The backscattering signals from subsequent Ni layers in the NiSi2 (111) surface are resolved.The topology of the NiSi2 (111) surface is concluded to be bulklike, i.e., it is terminated by a Si – Ni – Si triple layer.

Depth-profiling the composition of bimetallic nanoparticles using medium energy ion scattering

2011 ◽  
Vol 605 (1-2) ◽  
pp. 220-224 ◽  
Author(s):  
Johan Gustafson ◽  
Andrew R. Haire ◽  
Christopher J. Baddeley
Keyword(s):  
Bimetallic Nanoparticles ◽  
Depth Profiling ◽  
Medium Energy ◽  
Ion Scattering ◽  
Medium Energy Ion Scattering

Surface structure of sphalerite studied by medium energy ion scattering and XPS

2007 ◽  
Vol 601 (2) ◽  
pp. 352-361 ◽  
Author(s):  
S.L. Harmer ◽  
L.V. Goncharova ◽  
R. Kolarova ◽  
W.N. Lennard ◽  
M.A. Muñoz-Márquez ◽  
...  
Keyword(s):  
Surface Structure ◽  
Medium Energy ◽  
Ion Scattering ◽  
Medium Energy Ion Scattering
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