Atomic layer deposition of ultrathin indium oxide and indium tin oxide films using a trimethylindium, tetrakis(dimethylamino)tin, and ozone precursor system

2019 ◽  
Vol 37 (1) ◽  
pp. 010905 ◽  
Author(s):  
Hossein Salami ◽  
Alan Uy ◽  
Aarathi Vadapalli ◽  
Corinne Grob ◽  
Vivek Dwivedi ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Indium Oxide ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Ozone Precursor ◽  
Tin Oxide Films

High-Performance Thin-Film Transistors of Quaternary Indium–Zinc–Tin Oxide Films Grown by Atomic Layer Deposition

2019 ◽  
Vol 11 (16) ◽  
pp. 14892-14901 ◽  
Author(s):  
In-Hwan Baek ◽  
Jung Joon Pyeon ◽  
Seong Ho Han ◽  
Ga-Yeon Lee ◽  
Byung Joon Choi ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Thin Film Transistors ◽  
High Performance ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Zinc Tin Oxide ◽  
Tin Oxide Films

Atomic layer deposition of tin oxide films using tetrakis(dimethylamino) tin

2008 ◽  
Vol 26 (2) ◽  
pp. 244-252 ◽  
Author(s):  
Jeffrey W. Elam ◽  
David A. Baker ◽  
Alexander J. Hryn ◽  
Alex B. F. Martinson ◽  
Michael J. Pellin ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Tin Oxide Films

Atomically Thin Indium-Tin-Oxide Transistors Enabled by Atomic Layer Deposition

2021 ◽  
pp. 1-6
Author(s):  
Zhuocheng Zhang ◽  
Yaoqiao Hu ◽  
Zehao Lin ◽  
Mengwei Si ◽  
Adam Charnas ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Atomic Layer ◽  
Layer Deposition
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