High-Performance Thin-Film Transistors of Quaternary Indium–Zinc–Tin Oxide Films Grown by Atomic Layer Deposition

In-Hwan Baek; Jung Joon Pyeon; Seong Ho Han; Ga-Yeon Lee; Byung Joon Choi; Jeong Hwan Han; Taek-Mo Chung; Cheol Seong Hwang; Seong Keun Kim

doi:10.1021/acsami.9b03331

High-Performance Thin-Film Transistors of Quaternary Indium–Zinc–Tin Oxide Films Grown by Atomic Layer Deposition

ACS Applied Materials & Interfaces ◽

10.1021/acsami.9b03331 ◽

2019 ◽

Vol 11 (16) ◽

pp. 14892-14901 ◽

Cited By ~ 8

Author(s):

In-Hwan Baek ◽

Jung Joon Pyeon ◽

Seong Ho Han ◽

Ga-Yeon Lee ◽

Byung Joon Choi ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Tin Oxide ◽

Thin Film Transistors ◽

High Performance ◽

Oxide Films ◽

Atomic Layer ◽

Layer Deposition ◽

Zinc Tin Oxide ◽

Tin Oxide Films

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Effect of rapid thermal annealing on the properties of zinc tin oxide films prepared by plasma-enhanced atomic layer deposition

Ceramics International ◽

10.1016/j.ceramint.2020.02.073 ◽

2020 ◽

Vol 46 (9) ◽

pp. 13033-13039 ◽

Cited By ~ 2

Author(s):

Xing-Tao Xue ◽

Yang Gu ◽

Hong-Ping Ma ◽

Cheng-Zhou Hang ◽

Jia-Jia Tao ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Tin Oxide ◽

Oxide Films ◽

Atomic Layer ◽

Layer Deposition ◽

Zinc Tin Oxide ◽

Tin Oxide Films

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Resistive Switching in Zinc-Tin-Oxide and Atomic Layer Deposition of Nanolaminates for Amorphous Oxide Semiconductor Thin Film Transistors

ECS Meeting Abstracts ◽

10.1149/ma2012-02/41/3009 ◽

2012 ◽

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Tin Oxide ◽

Thin Film Transistors ◽

Atomic Layer ◽

Oxide Semiconductor ◽

Amorphous Oxide Semiconductor ◽

Layer Deposition ◽

Zinc Tin Oxide ◽

Semiconductor Thin Film

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Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma

Applied Surface Science ◽

10.1016/j.apsusc.2015.09.062 ◽

2015 ◽

Vol 357 ◽

pp. 672-677 ◽

Cited By ~ 5

Author(s):

Jeong Hwan Han ◽

Byoung Kook Lee ◽

Eun Ae Jung ◽

Hyo-Suk Kim ◽

Seong Jun Kim ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Tin Oxide ◽

Oxygen Plasma ◽

Oxide Films ◽

Atomic Layer ◽

Layer Deposition ◽

Zinc Tin Oxide ◽

Tin Oxide Films

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Low-temperature high-performance In-Ga-Sn-O thin-film transistors with Al2O3 grown by a facile dual-atomic layer deposition

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2021.160053 ◽

2021 ◽

pp. 160053

Author(s):

Hyunjae Jang ◽

Changyong Oh ◽

Tae Hyun Kim ◽

Hyeong Wook Kim ◽

Sang Ik Lee ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

High Performance ◽

Atomic Layer ◽

Layer Deposition

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8.2: High Performance Oxide Thin Film Transistors Fabricated by Atomic Layer Deposition Process

SID Symposium Digest of Technical Papers ◽

10.1002/sdtp.15043 ◽

2021 ◽

Vol 52 (S2) ◽

pp. 141-141

Author(s):

Dedong Han ◽

Huijin Li ◽

Junchen Dong ◽

Xiaobin Zhou ◽

Qi Li ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

High Performance ◽

Atomic Layer ◽

Deposition Process ◽

Oxide Thin Film ◽

Atomic Layer Deposition Process ◽

Layer Deposition

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High-performance ZnO thin-film transistors on gate dielectrics grown by atomic layer deposition

Applied Physics Letters ◽

10.1063/1.2188379 ◽

2006 ◽

Vol 88 (12) ◽

pp. 123509 ◽

Cited By ~ 231

Author(s):

P. F. Carcia ◽

R. S. McLean ◽

M. H. Reilly

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

High Performance ◽

Gate Dielectrics ◽

Atomic Layer ◽

Zno Thin Film ◽

Layer Deposition

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CO Gas Sensing by Ultrathin Tin Oxide Films Grown by Atomic Layer Deposition Using Transmission FTIR Spectroscopy†

The Journal of Physical Chemistry A ◽

10.1021/jp800518v ◽

2008 ◽

Vol 112 (39) ◽

pp. 9211-9219 ◽

Cited By ~ 42

Author(s):

X. Du ◽

Y. Du ◽

S. M. George

Keyword(s):

Atomic Layer Deposition ◽

Ftir Spectroscopy ◽

Tin Oxide ◽

Gas Sensing ◽

Oxide Films ◽

Atomic Layer ◽

Layer Deposition ◽

Tin Oxide Films ◽

Co Gas

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The Fabrication of Tin Oxide Films by Atomic Layer Deposition using Tetrakis(Ethylmethylamino) Tin Precursor

Transactions on Electrical and Electronic Materials ◽

10.4313/teem.2009.10.6.200 ◽

2009 ◽

Vol 10 (6) ◽

pp. 200-202 ◽

Cited By ~ 24

Author(s):

Woon-Seop Choi

Keyword(s):

Atomic Layer Deposition ◽

Tin Oxide ◽

Oxide Films ◽

Atomic Layer ◽

Layer Deposition ◽

Tin Oxide Films

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P‐13: High Performance a ‐IGZO Thin‐Film Transistors Grown by Atomic Layer Deposition: Cation Combinatorial Approach

SID Symposium Digest of Technical Papers ◽

10.1002/sdtp.13162 ◽

2019 ◽

Vol 50 (1) ◽

pp. 1259-1262 ◽

Cited By ~ 1

Author(s):

Min Hoe Cho ◽

Hyunjoo Seol ◽

Nuri On ◽

Tai Kyu Kim ◽

Pil Sang Yun ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

High Performance ◽

Atomic Layer ◽

Combinatorial Approach ◽

Layer Deposition

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Influence of indium doping on the properties of zinc tin oxide films and its application to transparent thin film transistors

Thin Solid Films ◽

10.1016/j.tsf.2013.10.182 ◽

2014 ◽

Vol 550 ◽

pp. 654-659 ◽

Cited By ~ 5

Author(s):

Mu Hee Choi ◽

Tae Young Ma

Keyword(s):

Thin Film ◽

Tin Oxide ◽

Thin Film Transistors ◽

Oxide Films ◽

Indium Doping ◽

Zinc Tin Oxide ◽

Tin Oxide Films

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