CO Gas Sensing by Ultrathin Tin Oxide Films Grown by Atomic Layer Deposition Using Transmission FTIR Spectroscopy†

2008 ◽  
Vol 112 (39) ◽  
pp. 9211-9219 ◽  
Author(s):  
X. Du ◽  
Y. Du ◽  
S. M. George
Keyword(s):  
Atomic Layer Deposition ◽  
Ftir Spectroscopy ◽  
Tin Oxide ◽  
Gas Sensing ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Tin Oxide Films ◽  
Co Gas

High-Performance Thin-Film Transistors of Quaternary Indium–Zinc–Tin Oxide Films Grown by Atomic Layer Deposition

2019 ◽  
Vol 11 (16) ◽  
pp. 14892-14901 ◽  
Author(s):  
In-Hwan Baek ◽  
Jung Joon Pyeon ◽  
Seong Ho Han ◽  
Ga-Yeon Lee ◽  
Byung Joon Choi ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Thin Film Transistors ◽  
High Performance ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Zinc Tin Oxide ◽  
Tin Oxide Films

Atomic layer deposition of tin oxide films using tetrakis(dimethylamino) tin

2008 ◽  
Vol 26 (2) ◽  
pp. 244-252 ◽  
Author(s):  
Jeffrey W. Elam ◽  
David A. Baker ◽  
Alexander J. Hryn ◽  
Alex B. F. Martinson ◽  
Michael J. Pellin ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Tin Oxide Films

SnO2nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance

2010 ◽  
Vol 21 (24) ◽  
pp. 245605 ◽  
Author(s):  
Won-Sik Kim ◽  
Byoung-Sun Lee ◽  
Dai-Hong Kim ◽  
Hong-Chan Kim ◽  
Woong-Ryeol Yu ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Gas Sensing ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Sensing Performance
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