In situ XPS study of low temperature atomic layer deposition of B2O3 films on Si using BCl3 and H2O precursors

2018 ◽  
Vol 36 (6) ◽  
pp. 061503 ◽  
Author(s):  
Aparna Pilli ◽  
Jessica Jones ◽  
Veronica Lee ◽  
Natasha Chugh ◽  
Jeffry Kelber ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
In Situ Xps ◽  
Layer Deposition ◽  
Xps Study

(Invited) In Situ XPS in Atomic Layer Deposition of Oxides on Ge (100)

2019 ◽  
Vol 33 (6) ◽  
pp. 455-462 ◽  
Author(s):  
Shankar Swaminathan ◽  
Paul C. McIntyre
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
In Situ Xps ◽  
Layer Deposition

scholarly journals AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing

RSC Advances ◽  
2019 ◽  
Vol 9 (22) ◽  
pp. 12226-12231 ◽  
Author(s):  
Wei-Chung Kao ◽  
Wei-Hao Lee ◽  
Sheng-Han Yi ◽  
Tsung-Han Shen ◽  
Hsin-Chih Lin ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Epitaxial Growth ◽  
Atomic Layer ◽  
Layer By Layer ◽  
Schematic Diagram ◽  
Layer Deposition ◽  
Processing Cycle

The schematic diagram of the processing cycle including the atomic layer annealing (ALA) to achieve low-temperature epitaxial growth of AlN on SiC.

Low temperature formation of higher-k cubic phase HfO2 by atomic layer deposition on GeOx/Ge structures fabricated by in-situ thermal oxidation

2016 ◽  
Vol 108 (5) ◽  
pp. 052903 ◽  
Author(s):  
R. Zhang ◽  
P.-C. Huang ◽  
N. Taoka ◽  
M. Yokoyama ◽  
M. Takenaka ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thermal Oxidation ◽  
Atomic Layer ◽  
Cubic Phase ◽  
Layer Deposition
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